Atomic Layer Deposition(ALD)

Atomic Layer Deposition

Atomic layer deposition (ALD) is a key technique that enables the growth of functional thin films for next-generation memories, accordingly, recent advances grown by ALD technique are addressed.

Memories

Dynamic Random Access Memory (DRAM)/Non-Volatile Memory (NVM)

Semiconductor memories are important electronic components in modern electronic systems. We use the memories in computers and smartphones, and many electronic devices. We research functional materials for next-generation memories such as DRAM (Dynamic Random Access Memory) and ReRAM (Resistive-switching Random Access Memory).

2DEG Devices

2-Dimensional Electron Gas(2DEG) Devices

2-Dimensional systems (Graphene and etc.) have been attracting great attention in nano-electronics (i.e. nano transistors). 2-Dimensional Electron Gas (2-DEG) using SrTiO3 (STO)-based heterostructures provide promising opportunities in oxide nano-electronics, recently.

So far, most of the LaAlO3 (LAO) films were grown epitaxially by pulsed laser deposition (PLD) on single crystalline (001) STO substrates. We research the formation of 2-DEG using several amorphous layers grown by the atomic layer deposition (ALD) technique.

Thin Film Transistor

Thin Film Transistor

Transistors are key components in modern electronic systems. We research high-performance thin film transistors for displays and logic devices.

Thin Film Solar Cell

Thin Film Solar Cell

Solar cell is an electronic device that directly converts sunlight into electricity. With the growing demand for low-cost photovoltaic systems that are truly scalable to the terawatts level, thin-film solar cells comprised of Earth-abundant semiconductor materials are considered a promising candidate class of materials (Cu2O, SnS). An essential step to realizing the full potential of these materials is “interface engineering,” i.e., the design of materials to tailoring electron-energy levels and recombination activity at hetero-interfaces. We research CIGS thin film solar cells as well as Cu2O and SnS solar cells for high power conversion efficiency