Se Eun Kim, Ju Young Sung, Yewon Yun, Byeongjun Jeon, Sang Mo Moon, Han Bin Lee, Chae Hyun Lee, Hae Jun Jung, Jae-Ung Lee, Sang Woon Lee, "Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: a brief review", Current Applied Physics, 64, 8 (2024)
DOI: https://doi.org/10.1016/j.cap.2024.05.011
Hyobin Eom, Woojin Bae, Ju Young Sung, Ji Hyeon Choi, Kyun Seong Dae, Jae Hyuck Jang, Tae Joo Park, Sang Woon Lee, Bonggeun Shong, “Formation of oxygen vacancy at surfaces of ZnO by trimethylaluminum”, APL Materials, 12, 031115 (2024)
DOI : https://doi.org/10.1063/5.0198197Gangseon Ji, Hwan Sik Kim, Seong Ho Cha, Hyoung-Taek Lee, Hye Ju Kim, Sang Woon Lee, Kwang Jun Ahn, Kyoung-Ho Kim, Yeong Hwan Ahn, Hyeong-Ryeol Park, “Terahertz virus-sized gold nanogap sensor”, Nanophotonics, 12, 147 (2023)
DOI : https://doi.org/10.1515/nanoph-2022-0706Seo Young Jang, Hye Min Lee, Ju Young Sung, Se Eun Kim, Jae Deock Jeon, Yewon Yun, Sang Woon Lee*, “Epitaxial growth of NbN thin films using atomic layer deposition”, Applied Surface Science, 636, 157824 (2023)
DOI: https://doi.org/10.1016/j.apsusc.2023.157824
Heung-Yoon Choi, Jae Deock Jeon, Se Eun Kim, Seo Young Jang, Ju Young Sung, Sang Woon Lee*, “Strained BaTiO3 thin films via in-situ crystallization using atomic layer deposition on SrTiO3 substrate”, Materials Science in Semiconductor Processing, 160, 107442 (2023)
DOI: https://doi.org/10.1016/j.mssp.2023.107442
Hyeok Jae Lee, Seo young Jang, Hye Min Lee, Ju Young Sung, Se Eun Kim, Jae Deock Jeon, Yewon Yun, Sang Woon Lee*, “Alternative surface reaction route in the atomic layer deposition of NbN thin films for reduced resistivity", Journal of Alloys and Compounds, 952, 170033 (2023)
DOI: https://doi.org/10.1016/j.jallcom.2023.170033
Kang Min Lee, Se Eun Kim, Sun-Kyung Kim, and Sang Woon Lee*, “Highly Flexible Deep-ultraviolet Photodetectors Using Amorphous Gallium Oxide Thin Films Grown by Atomic Layer Deposition”, Materials Today Communications, 33, 104268 (2022)
DOI : https://doi.org/10.1016/j.mtcomm.2022.104268Kwanbyung Chae, Van Tu Nguyen, Sangryun Lee, Quynh Thi Phung, Yumin Sim, Maeng-Je Seong, Sang Woon Lee, Yeong Hwan Ahn, Soonil Lee, Seunghwa Ryu, Ji-Yong Park, “Mechanical Failures of Two-Dimensional Materials on Polymer Substrates”, Applied Surface Science, 605, 154736 (2022)
DOI : https://doi.org/10.1016/j.apsusc.2022.154736Se Eun Kim, Ju Young Sung, Jae Deock Jeon, Seo Young Jang, Hye Min Lee, Sang Mo Moon, Jun Goo Kang, HanJin Lim, Hyung-Suk Jung, and Sang Woon Lee*, “Toward Advanced High-k and Electrode Thin Films for DRAM Capacitors via Atomic Layer Deposition”, Advanced Materials Technologies, 2200878 (2022) - Invited review
DOI : https://doi.org/10.1002/admt.202200878Se Eun Kim, Seo Young Jang, Kyung-Ho Park, Sang Woon Lee*, “A Route for an Improved Hydrogen Sensing Window Using ZnO Decorated Pt/AlGaN/GaN HEMT Sensors”, Ceramics International, 48, 23590 (2022)
DOI : https://doi.org/10.1016/j.ceramint.2022.05.007Myoung Su Seo, Sang Woon Lee*, “Arsenic-free ovonic threshold switch for next-generation selectors in three-dimensional cross-point memories”, Materials Today Communications, 29, 102849 (2021)
DOI : https://doi.org/10.1016/j.mtcomm.2021.102849Joung Eun Yoo#, Ju Young Sung#, Jin Ha Hwang#, In hee Maeng, Seung Jae Oh, In Ho Lee, Ji Hoon Shim, Sung Dug Kim, Du-Seop Yoon, Seo Young Jang, Young Jae Kang*, Sang Woon Lee*, “MAX-Phase Films Overcome Scaling Limitations to the Resistivity of Metal Thin Films”, ACS Applied Materials & Interfaces, 13, 61809-61817 (2021)
DOI : https://doi.org/10.1021/acsami.1c20516Jeong Woo Park, Hyo Bin Eom, Seong Hwan Kim, Tae Jun Seok, Tae Joo Park, Sang Woon Lee, Bong Geun Shong*, “Chemical Mechanism of Formation of Two-Dimensional Electron Gas at the Al2O3/TiO2 Interface by Atomic Layer Deposition”, Materials Today Advances, 12, 100195 (2021)
DOI : https://doi.org/10.1016/j.mtadv.2021.100195Hyeok Jae Lee, Jin Ha Hwang, Ji-Yong Park, Sang Woon Lee*, “Alternative Surface Reaction Route in the Atomic Layer Deposition of Titanium Nitride Thin Films for Electrode Applications”, ACS Applied Electronic Materials, 3, 999 (2021)
DOI : https://doi.org/10.1021/acsaelm.0c01079Tae Jun Seok, Yuhang Liu, Ji Hyeon Choi, Hye Ju Kim, Dae Hyun Kim, Sung Min Kim, Jae Hyuck Jang, Deok-Yong Cho, Sang Woon Lee*, and Tae Joo Park*, “In situ Observation of Two-Dimensional Electron Gas Creation at the interface of an Atomic-Layer-Deposited Al2O3/TiO2 Thin Film Heterostructure”, Chemistry of Materials, 32, 7662 (2020)
DOI : https://doi.org/10.1021/acs.chemmater.0c01572Seung Hyun Lee, Kang Min Lee, and Sang Woon Lee*, “Influence of Process Temperature on a Phase of Ga2O3 Thin Films Grown by Atomic Layer Deposition on Sapphire”, Bulletin of the Korean Chemical Society, 41, 1190 (2020)
DOI : https://doi.org/10.1002/bkcs.12135Sung Min Kim, Hye Ju Kim, Hae Jun Jung, Seong Hwan Kim, Ji-Yong Park, Tae Jun Seok, Tae Joo Park*, and Sang Woon Lee*, “Highly Uniform Resistive Switching Performances Using Two-dimensional Electron Gas at Thin Film Heterostructure for Conductive Bridge Random Access Memory” ACS Applied Materials & Interfaces, 11, 33, 30028-30036 (2019)
DOI : https://doi.org/10.1021/acsami.9b08941Sung Min Kim, Hye Ju Kim, Hae Jun Jung, Ji-Yong Park, Tae Jun Seok, Yong-Ho Choa, Tae Joo Park*, and Sang Woon Lee*, “High-performance, Transparent Thin Film Hydrogen Gas Sensor using 2D Electron Gas at Interface of Oxide Thin Film Heterostructure Grown by Atomic Layer Deposition” Advanced Functional Materials, 29, 1807760 (2019)
DOI : https://doi.org/10.1002/adfm.201807760Seung Hyun Lee, Kang min Lee, Young-Bin Kim, Yoon-Jong Moon, Soo Bin Kim, Dukkyu Bae, Tae Jung Kim, Young Dong Kim, Sun-Kyung Kim*, and Sang Woon Lee*, “Sub-microsecond response time deep-ultraviolet photodetectors using a-Ga2O3 thin films grown via low-temperature atomic layer deposition”, Journal of Alloys and Compounds, 780, 400 (2018)
DOI : https://doi.org/10.1016/j.jallcom.2018.11.333Tae Jun Seok,Yuhang Liu, Hae Jun Jung, Soo Bin Kim, Dae Hyun Kim, Sung Min Kim, Jae Hyuck Jang, Deok-Yong Cho, Sang Woon Lee* and Tae Joo Park*, “New-Type Field-Effect Device Using Quasi Two-dimensional Electron Gas in Mass-Producible Atomic-Layer-Deposited Al2O3/TiO2 Ultrathin (< 10 nm) Film Heterostructure”, ACS Nano, 12, 10403 (2018)
DOI : https://doi.org/10.1021/acsnano.8b05891Jeeyoon Jeong, Hyeong Seok Yun, Dasom Kim, Kang Sup Lee, Han-Kyu Choi, Zee Hwan Kim, Sang Woon Lee, and Dai-Sik Kim, “High Contrast Detection of Water-filled Terahertz Nanotrenches”, Advanced Optical Materials, 1800582 (2018)
DOI: https://doi.org/10.1002/adom.201800582
Ju-Young Pyo, Jin-Hyeok Jeon, Yumin Koh, Chu-young Cho, Hyeong-Ho Park, Kyung-Ho Park, Sang Woon Lee, and Won-Ju Cho, “AlGaN/GaN high-electron-mobility transistor pH sensor with extended gate platform”, AIP Advances, 8, 085106 (2018)
DOI : https://doi.org/10.1063/1.5041847Soo Bin Kim, Yeong Hwan Ahn, Ji-Yong Park and Sang Woon Lee*, “Enhanced nucleation and growth of HfO2 thin films grown by atomic layer deposition on graphene”, Journal of Alloys and Compounds, 742, 676 (2018)
DOI : https://doi.org/10.1016/j.jallcom.2018.01.273Yoon-Jong Moon, Jin-Young Na, Yong Hyun Park, Soo Bin Kim, Sang Woon Lee*, and Sun-Kyung Kim*, “Broadband Omnidirectional Diffuse Mirrors with Hierarchically Designed All-Dielectric Surfaces”, ACS Photonics, 5 (3), 752 (2018)
DOI : https://doi.org/10.1021/acsphotonics.7b01364Soo Bin Kim, Seung Hyun Lee, Hae Jun Jung, Myung Su Seo, Sung Min Kim, Soonil Lee, Ji-Yong Park, Tae Joo Park, Hae-Yong Jeong, Dong-Hwan Jun, Kyung Ho Park, Won-Kyu Park, and Sang Woon Lee*, “Influences of surface treatment on In0.53Ga0.47As epitaxial layer grown on silicon substrate using trimethylaluminum”, Thin Solid Films, 646, 173 (2018)
DOI : https://doi.org/10.1016/j.tsf.2017.12.009Woongbin Yim, Sae June Park, Sung Yong Han, Yong Hyun Park, Sang Woon Lee, Hui Joon Park, Yeong Hwan Ahn, Soonil Lee, and Ji-Yong Park*, “Carbon Nanotubes as Etching Masks for the Formation of Polymer Nanostructures”, ACS Applied Materials & Interfaces, 9 (50), 44053 (2017)
DOI : https://doi.org/10.1021/acsami.7b18035Seung Hyun Lee, Soo Bin Kim, Yoon-Jong Moon, Sung Min Kim, Hae Jun Jung, Myung Su Seo, Kang Min Lee, Sun-Kyung Kim*, and Sang Woon Lee*, “High-Responsivity Deep-Ultraviolet-Selective Photodetectors Using Ultrathin Gallium Oxide Films”, ACS Photonics, 4, 2937 (2017)
DOI : https://doi.org/10.1021/acsphotonics.7b01054Jong Ho Yoon, Hae Jun Jung, Jung Take Hong, Ji-Yong Park, Soonil Lee, Sang Woon Lee, and Yeong Hwan Ahn, “Electronic Band Alignment at Complex Oxide Interfaces Measured by Scanning Photocurrent Microscopy”, Scientific Reports, 7: 3824 (2017)
DOI : 10.1038/s41598-017-04265-9Yong Hyun Park and Sang Woon Lee*, “Influences of Graphene Surface Treatment Temperature on a Growth of Al2O3 Film by Atomic Layer Deposition on Graphene”, Bulletin of the Korean Chemical Society, 38, 1038 (2017)
DOI : https://doi.org/10.1002/bkcs.11215Seul Ji Song, Taehyung Park, Kyung Jean Yoon, Jung Ho Yoon, Dae Eun Kwon, Wontae Noh, and Clement Lansalot-Matras, Satoko Gatineau, Han-Koo Lee, Sanjeev Gautam, Deok-Yong Cho, Sang Woon Lee*, and Cheol Seong Hwang*, “Comparison of the Atomic Layer Deposition of Tantalum Oxide Thin Films Using Ta(NtBu)(NEt2)3 and Ta(NtBu)(NEt2)2Cp and H2O”, ACS Applied Materials & Interfaces, 9 (1), 537 (2017)
DOI : https://doi.org/10.1021/acsami.6b11613Taehwan Moon, Hae Jun Jung, Yu Jin Kim, Min Hyuk Park, Han Joon Kim, Keum Do Kim, Young Hwan Lee, Seung Dam Hyun, Hyeon Woo Park, Sang Woon Lee, and Cheol Seong Hwang, “Diode performance of the Pt/Al2O3/two-dimensional electron gas/SrTiO3 structure and its time-dependent resistance evolution”, APL Materials, 5, 042301 (2017)
DOI : https://doi.org/10.1063/1.4967280Yong Hyun Park, Mi Hye Kim, Soo Bin Kim, Hae Jun Jung, Kwanbyung Chae, Yeong Hwan Ahn, Ji-Yong Park, Fabian Rotermund*, and Sang Woon Lee*, “Enhanced Nucleation of High-k Dielectrics on Graphene by Atomic Layer Deposition”, Chemistry of Materials, 28, 7268 (2016)
DOI : https://doi.org/10.1021/acs.chemmater.6b02486Sang Woon Lee, “Two-Dimensional Electron Gas at SrTiO3-Based Oxide Heterostructures via Atomic Layer Deposition”, Journal of Nanomaterials, 2016, 1671390 (2016)
DOI : https://doi.org/10.1155/2016/1671390Woongkyu Lee, Sijung Yoo,Woojin Jeon, Yeon Woo Yoo, Cheol Hyun An, Min Jung Chung, Han Joon Kim, Sang Woon Lee, Cheol Seong Hwang, “Reducing the nano-scale defect formation of atomic-layer-deposited SrTiO3 films by adjusting the cooling rate of the crystallization annealing of the seed layer”, Thin Solid Films, 589, 723 (2015)
DOI : https://doi.org/10.1016/j.tsf.2015.07.008Woongkyu Lee, Woojin Jeon, Cheol Hyun An, Min Jung Chung, Han Joon Kim, Taeyong Eom, Sheby Mary George, Bo Keun Park, Jeong Hwan Han, Chang Gyoun Kim, Taek-Mo Chung, Sang Woon Lee, and Cheol Seong Hwang, “Improved Initial Growth Behavior of SrO and SrTiO3 Films Grown by Atomic Layer Deposition Using {Sr(demamp)(tmhd)}2 as Sr-Precursor”, Chemistry of Materials, 27, 3881(2015)
DOI : https://doi.org/10.1021/acs.chemmater.5b00843Sin Cheng Siah#, Sang Woon Lee# (equally contributed), Yun Seog Lee, Jaeyeong Heo, Sang Bok Kim, Roy G. Gordon, and Tonio Buonassisi, “X-ray absorption spectroscopy elucidates the impact of structural disorder on electron mobility in amorphous zinc-tin-oxide thin films”, Applied Physics Letters, 104, 242113 (2014)
DOI : https://doi.org/10.1063/1.4884115Prasert Sinsermsuksakul#, Leizhi Sun#, Sang Woon Lee# (equally contributed), Helen Park, Sang Bok Kim, Chuanxi Yang, and Roy G. Gordon, “Overcoming Efficiency Limitations of SnS-based Solar Cells”, Advanced Energy Materials, 4, 1400496 (2014)
DOI : https://doi.org/10.1002/aenm.201400496Yun Seog Lee, Danny Chua, Riley E. Brandt, Sin Cheng Siah, Jian Li, Jonathan P. Mailoa, Sang Woon Lee, Roy G. Gordon, and Tonio Buonassisi, “Atomic layer deposited gallium oxide buffer layer enables 1.2 V open-circuit voltage in cuprous oxide solar cells”, Advanced Materials, 26, 4704 (2014)
DOI : https://doi.org/10.1002/adma.201401054Sang Woon Lee, Yun Seog Lee, Jaeyeong Heo, Sang Bok Kim, Tonio Buonassisi, and Roy G. Gordon, “Improved Cu2O-Based Solar Cells Using Atomic Layer Deposition to Control the Cu Oxidation State at the p-n Junction”, Advanced Energy Materials, 4, 1301916 (2014)
DOI : https://doi.org/10.1002/aenm.201301916Sang Woon Lee, Jaeyeong Heo, and Roy G. Gordon, “Origin of the self-limited electron densities at Al2O3/SrTiO3 Heterostructures Grown by Atomic Layer Deposition - Oxygen Diffusion Model”, Nanoscale, 5, 8940 (2013)
DOI : https://doi.org/10.1039/C3NR03082BSang Woon Lee, Byung Joon Choi, Taeyong Eom, Jeong Hwan Han, Seong Keun Kim, Seul Ji Song, Woongkyu Lee, and Cheol Seong Hwang, “Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of functional electronic materials”, Coordination Chemistry Reviews, 257, 3154 (2013)
DOI : https://doi.org/10.1016/j.ccr.2013.04.010Woongkyu Lee, Jeong Hwan Han, Woo Jin Jeon, Yeon Woo Yoo, Sang Woon Lee, Seong Keun Kim, Chang-Hee Ko, Clement Lansalot, and Cheol Seong Hwang “Atomic Layer Deposition of SrTiO3 Films with Cyclopentadienyl-Based Precursors for Metal-Insulator-Metal Capacitors”, Chemistry of Materials, 25, 953 (2013)
DOI : https://doi.org/10.1021/cm304125eJeong Hwan Han, Woongkyu Lee, Woojin Jeon, Sang Woon Lee, Cheol Seong Hwang, Changhee Ko, and Julien Gatineau, “Growth of Conductive SrRuO3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO2 layers”, Chemistry of Materials, 24, 4686 (2012)
DOI : https://doi.org/10.1021/cm302470kSeul Ji Song, Sang Woon Lee, Gun Hwan Kim, Jun Yeong Seok, Kyung Jean Yoon, Jung Ho Yoon, Cheol Seong Hwang, Changhee Ko, and Julien Gatineau, “Substrate dependent growth behaviors of plasma-enhanced atomic layer deposited nickel oxide films for resistive switching application”, Chemistry of Materials, 24, 4675 (2012)
DOI : https://doi.org/10.1021/cm302182sSang Woon Lee, Yiqun Liu, Jaeyeong Heo, and Roy G. Gordon, “Creation and Control of Two-Dimensional Electron Gas Using Al-based Amorphous Oxides/SrTiO3 Heterostructures Grown by Atomic Layer Deposition”, Nano Letters, 12, 4775 (2012)
DOI : https://doi.org/10.1021/nl302214xWoongkyu Lee, Jeong Hwan Han, Sang Woon Lee, Sora Han, Woo Jin Jeon and Cheol Seong Hwang, “Controlling the Initial Growth Behavior of SrTiO3 Films by Interposing Al2O3 Layers between the Film and the Ru Substrate”, Journal of Materials Chemistry, 22, 15037 (2012)
DOI : https://doi.org/10.1039/C2JM31897KJeong Hwan Han, Sang Woon Lee, Seong Keun Kim, Sora Han, Woongkyu Lee, Cheol Seong Hwang, Christian Dussarrat, and Julien Gatineau, "Study on Initial Growth Behavior of RuO2 Film Grown by Pulsed Chemical Vapor Deposition: Effects of Substrate and Reactant Feeding Time", Chemistry of Materials, 24, 1407 (2012)
DOI : https://doi.org/10.1021/cm200989tJeong Hwan Han, Sora Han, Woongkyu Lee, Sang Woon Lee, Seong Keun Kim, Julien Gatineau, Christian Dussarrat, and Cheol Seong Hwang, "Improvement in the leakage current characteristic of metal-insulator-metal capacitor by adopting RuO2 film as bottom electrode", Applied Physics Letters, 99, 022901 (2011)
DOI : https://doi.org/10.1063/1.3609875Sang Woon Lee, Jeong Hwan Han, Sora Han, Woongkyu Lee, Jae Hyuck Jang, Minha Seo, Seong Keun Kim, C. Dussarrat, and J. Gatineau, Yo-Sep Min, and Cheol Seong Hwang, “Atomic Layer Deposition of SrTiO3 Thin Films with Highly Enhanced Growth Rate for Ultrahigh Density Capacitors”, Chemistry of Materials, 23, 2227 (2011)
DOI : https://doi.org/10.1021/cm2002572Sang Woon Lee, Jeong Hwan Han, Seong Keun Kim, Sora Han, and Woongkyu Lee and Cheol Seong Hwang, "Role of Interfacial Reaction in Atomic Layer Deposition of TiO2 Thin Films Using Ti(O-iPr)2(tmhd)2 on Ru or RuO2 substrate", Chemistry of Materials, 23, 976 (2011)
DOI : https://doi.org/10.1021/cm1026128Jeong Hwan Han, Sang Woon Lee, Seong Keun Kim, Sora Han, Cheol Seong Hwang, Christian Dussarrat, and Julien Gatineau, "Growth of RuO2 Thin Films by Pulsed-Chemical Vapor Deposition Using RuO4 Precursor and 5% H2 Reduction Gas", Chemistry of Materials, 22, 5700 (2010)
DOI : https://doi.org/10.1021/cm101694gSeong Keun Kim, Sang Woon Lee (equally contributed)*, Jeong Hwan Han, Bora Lee, Seungwu Han, and Cheol Seong Hwang, “Capacitors with an equivalent oxide thickness of < 0.5 nm for nano-electronic semiconductor memory”, Advanced Functional Materials, 20, 2989 (2010)
DOI : https://doi.org/10.1002/adfm.201000599Tae Joo Park, Jeong Hwan Kim, Jae Hyuck Jang, Joohwi Lee, Sang Woon Lee, Un Ki Kim, Minha Seo, Hyung Suk Jung, Sang Young Lee, and Cheol Seong Hwang, "Optimized Electrical Properties and Chemical Structures of SrTiO3 Thin Films on Si Using Various Interfacial Barrier Layers", Journal of Electrochemical Society, 157 (10) G216-G220 (2010)
DOI : https://doi.org/10.1149/1.3474233Seok-Jun Won, Sungin Suh, Sang Woon Lee, Gyu-Jin Choi, Cheol Seong Hwang and Hyeong Joon Kim “Substrate Dependency of Thin Film Growth Rate in Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide using N2O as Oxygen Source”, Electrochemical and Solid-State Letters, 13 (2) G13-G16 (2009)
DOI : https://doi.org/10.1149/1.3269901Sang Woon Lee, Jeong Hwan Han, and Cheol Seong Hwang, “Electronic conduction mechanism of SrTiO3 thin film grown on Ru electrode by atomic layer deposition”, Electrochemical and Solid-State Letters, 12 (11) G69-G71 (2009)
DOI : https://doi.org/10.1149/1.3212897Tae Joo Park, Jeong Hwan Kim, Jae Hyuck Jang, Joohwi Lee, Sang Woon Lee, Sang Young Lee, Hyung Suk Jung, and Cheol Seong Hwang, “Effects of Annealing Environment on Interfacial Reactions and Electrical Properties of Ultrathin SrTiO3 on Si”, Journal of Electrochemical Society, 156 (9) G129-G133 (2009)
DOI : https://doi.org/10.1149/1.3152268Jeong Hwan Han, Sang Woon Lee, Gyu-Jin Choi, Sang Young Lee, Cheol Seong Hwang, Christian Dussarrat, Julien Gatineau, “Chemical vapor deposition of Ru thin films with an enhanced morphology, thermal stability and electrical properties using a RuO4 precursor”, Chemistry of Materials, 21 (2), 207-209, (2009)
DOI : https://doi.org/10.1021/cm802485rSang Woon Lee, Jeong Hwan Han, Oh Seong Kwon and Cheol Seong Hwang, “Influences of a crystalline seed layer during atomic layer deposition of SrTiO3 thin films using Ti(O-iPr)2(thd)2, Sr(thd)2, and H2O”, Journal of Electrochemical Society, 155 (11) G253-G257 (2008)
DOI : https://doi.org/10.1149/1.2976211Sang Woon Lee, Oh Seong Kwon, Jeong Hwan Han and Cheol Seong Hwang, "Enhanced Electrical Properties of SrTiO3 Thin Films Grown by Atomic Layer Deposition at High Temperature for Dynamic Random Access Memory Applications", Applied Physics Letters, 92, 222903 (2008)
DOI : https://doi.org/10.1063/1.2939102Seong Keun Kim, Gyu-Jin Choi, Sang Young Lee, Minha Seo, Sang Woon Lee, Jeong Hwan Han, Hyo-Shin Ahn, Seungwu Han, and Cheol Seong Hwang,"Al-Doped TiO2 Films with Ultralow Leakage Currents for Next Generation DRAM Capacitors", Advanced Materials, 20, 1429-1435 (2008)
DOI : https://doi.org/10.1002/adma.200701085Oh Seong Kwon, Sang Woon Lee, Jeong Hwan Han and Cheol Seong Hwang, “Atomic layer deposition and electrical properties of SrTiO3 thin films grown using Sr(C11H19O2)2, Ti(Oi-C3H7)4, and H2O”, Journal of Electrochemical Society, 154 (6) G127 (2007)
DOI : https://doi.org/10.1149/1.2720763Seong Keun Kim, Sang Young Lee, Sang Woon Lee, Gyu Weon Hwang, and Cheol Seong Hwang, “Atomic layer deposition of Ru thin films using 2,4-(dimethylpentadienyl)(ethylcyclopentadienyl)Ru by liquid injection system”, Journal of Electrochemical Society, 154 (2) D95 (2007)
DOI : 10.1109/ISAF.2007.4393201Seong Keun Kim, Kyung-Min Kim, Oh Seong Kwon, Sang Woon Lee, Chung Bae Jeon, Woo Young Park, Cheol Seong Hwang, and Jaehack Jeong, "Structurally and Electrically Uniform Deposition of High-k TiO2 Thin Films on a Ru Electrode in Three-Dimensional Contact Holes Using Atomic Layer Deposition", Electrochemical and Solid-State Letters, 8(12), F59-F62, (2005)
DOI : https://doi.org/10.1149/1.2081994Wan Don Kim, Gyu Weon Hwang, Oh Seong Kwon, Seong Keun Kim, Moonju Cho, Jeong Doo Seok, Sang Woon Lee, Min Ha Seo, Cheol Seong Hwang, Yo-Sep Min and Young Jin Cho, “Growth characteristics of atomic layer deposited TiO2 thin films on Ru and Si electrodes for memory capacitors applications”, Journal of Electrochemical Society, 152 (8) C552 (2005)
DOI : https://doi.org/10.1149/1.1943589Sang Woon Lee, Oh Seong Kwon and Cheol Seong Hwang, “Chemically Conformal Deposition of SrTiO3 Thin Films by Atomic Layer Deposition Using Conventional Metal Organic Precursors and Remote-Plasma Activated H2O Reactant”, Microelectronic Engineering, 80, 158 (2005)
DOI : 10.1016/j.mee.2005.04.060