October 20-21Â
NAPEX Virtual Symposium 2026
đź“… October 20-21, 2026
The North American Plasma Etch Exchange (NAPEX) is pleased to announce its inaugural Virtual Symposium, “Frontiers in Nanoscale Plasma Etching” bringing together the plasma processing community from across the globe for two days of technical presentations, discussion, knowledge exchange, and collaboration.
Building upon the successful tradition of the NNCI Etch Symposium, the NAPEX Virtual Symposium 2026 will provide an open forum for researchers, engineers, nanofabrication facility professionals, students, equipment manufacturers, national laboratories, and industry partners to exchange ideas, discuss emerging challenges, share process knowledge, and explore the latest advances in plasma etching and related plasma processing technologies.
Advanced plasma etching for semiconductor manufacturing
Plasma processing of emerging materials
Atomic layer etching (ALE)
Cryogenic plasma etching
Dielectric and metal etching
Wide-bandgap semiconductor processing (GaN, AlGaN)
MEMS, photonics, and quantum applications.Â
Plasma diagnostics and process characterization
Artificial intelligence and machine learning for plasma processing
Sustainability in plasma processing
The program will feature invited presentations from leading researchers and industry experts, technical presentations representing academia, national laboratories, and industry, student research presentations, vendor technology updates, and opportunities for community networking and open technical discussion.
A central goal of the symposium is to encourage the exchange of practical process knowledge and create new opportunities for collaboration among universities, nanofabrication facilities, national laboratories, equipment manufacturers, and the semiconductor industry.
The symposium is open to a broad community of professionals, researchers, and students interested in plasma etching and plasma processing technologies. Attendees are expected to include university researchers, graduate and undergraduate students, nanofabrication facility staff, process engineers, semiconductor industry professionals, equipment manufacturers, national laboratory researchers, and government scientists. Anyone interested in advancing their knowledge, exchanging ideas, and exploring the latest developments in plasma etching, plasma processing, semiconductor fabrication, and related technologies is encouraged to attend.Â
Presentations will be on an invited basisÂ
Registration information, the technical program, invited speakers, and the detailed symposium agenda will be announced in the coming weeks.
We look forward to welcoming the plasma processing community to the inaugural NAPEX Virtual Symposium and beginning a new chapter of collaboration, technical exchange, and innovation across the North American plasma processing community.
Visit this page regularly for updates, or contact the NAPEX organizing committee if you are interested in presenting, sponsoring, or participating in the symposium.
For more info, please contact: join.napex@gmail.com