Major Equipment in Shared Facilities
We have convenient access to major micro and nanofabrication equipment housed in the cleanroom facilities at both the University of Houston and Rice University.
Photolithography
Electron-beam lithography
Focused ion beam
Scanning electron microscopy
Evaporation thin film deposition
Sputtering thin film deposition
Ion Milling
Reactive Ion Etching
Wet Etching
Atomic Force Microscopy
Plasma etching
Spin Coater
Profilometry