Major Equipment in Shared Facilities

We have convenient access to major micro and nanofabrication equipment housed in the cleanroom facilities at both the University of Houston and Rice University.

Photolithography

Electron-beam lithography

Focused ion beam

Scanning electron microscopy

Evaporation thin film deposition

Sputtering thin film deposition

Ion Milling

Reactive Ion Etching

Wet Etching

Atomic Force Microscopy

Plasma etching

Spin Coater

Profilometry

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