Diener Plasma Generator Nano

Diener Plasma Generator Nano

  • Low-pressure plasma system

  • Plasma cleaner, Plasma ashing, Plasma etching & Plasma activation

  • Gas Supply: Mass-Flow-Controllers (MFCs)

    • Available gasses: Argon, Oxygen, Hydrogen, Helium

  • Optional water cooling available

  • Electrodes: PE

  • Chamber dimensions: 240x420x240

  • Power: RF 300 Watt

  • 13,56 MHz RF Generator

  • PC controlled

Product page: click here

Data sheet: click here (PDF)

Manual: click here

Booking: Bookable via clustermarket

Contact: Maarten van Rossum

Instruction required: Yes

Location: W4.17