Diener Plasma Generator Nano
Diener Plasma Generator Nano
Low-pressure plasma system
Plasma cleaner, Plasma ashing, Plasma etching & Plasma activation
Gas Supply: Mass-Flow-Controllers (MFCs)
Available gasses: Argon, Oxygen, Hydrogen, Helium
Optional water cooling available
Electrodes: PE
Chamber dimensions: 240x420x240
Power: RF 300 Watt
13,56 MHz RF Generator
PC controlled
Product page: click here
Data sheet: click here (PDF)
Manual: click here
Booking: Bookable via clustermarket
Contact: Maarten van Rossum
Instruction required: Yes
Location: W4.17