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Vacuum Probestation
Vacuum Probestation
PARAMETER ANALYZER : KEITHLEY 4200 SCS
Temperature : 80K ~ 500K
Light Source : 780 nm, 633 nm and etc
tube FURNACE
tube FURNACE
Temperature : 200 ~ 1000 degree Celsius
Gas : Argon, Nitrogen, Forming Gas and etc
Maskless Lithography
Maskless Lithography
Critical Dimension ~ 1 um, 0.8 um
Photoresist : AZ GXR 601, AZ 5214E and etc
FUME HOOD
FUME HOOD
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