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Vacuum Probestation
Vacuum Probestation
PARAMETER ANALYZER : KEITHLEY 4200 SCS
Temperature : 80K ~ 500K
Light Source : 785 nm, 635 nm, 520 nm and etc
RF/DC Sputter
RF/DC Sputter
Target : ZnO, ITO, W and etc
Maskless Lithography
Maskless Lithography
&2D Transfer System
&2D Transfer System
Critical Dimension ~ 1 um, 0.8 um
Photoresist : AZ GXR 601, AZ 5214E and etc
tube FURNACE
tube FURNACE
Temperature : 200 ~ 1000 degree Celsius
Gas : Argon, Nitrogen, Forming Gas and etc
FUME HOOD
FUME HOOD
Spin Coater
Sonicator
Hot Plates
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