Nano/Micro Machining for Vacuum Electronics

The UC Davis MM and Microwave Plasma Diagnostics Group utilizes state of the art machines, processes, and techniques for the precision machining and fabrication of high-performance vacuum electronics and the development of cutting-edge research in mm-wave and microwave technology. Some of our technology includes:

• Three state of the art DMG Mori NN 1000 nano machines, capable of nano meter positioning and sub-micron scale feature milling in exotic substrates;
• Kern Micro precision pyramid nano machine, also with nano meter precision and micro feature production;
• Fully dedicated precision prototyping machine shop for the fabrication of research aids and for the support of the nano machining centers;
• Manual Lathes, Mills, and CNC Milling equipment.

During the past decade, the DMRC has used this equipment to not only support microwave research, but to also as a tool to explore the intricacies of micro and nano machining. While producing micro machined parts, we are able to research various aspects of advanced micro/nano machining with respect to their effect high-performance vacuum electronics. These aspects included:

• Tool selection, coatings, wear and longevity
• CNC programming techniques
• Work holding and fixturing
• Cooling, chip clearing and cutting environment
• Milling and fabrication pre and post processing.

Some examples of our nano and micro machined parts