Organometallic Precursors and Thin-Film Technologies for Semiconductors&Display
Semiconductor/Display Materials Team at the Korea Research Institute of Chemical Technology (KRICT) is dedicated to the development of advanced thin-film materials and processes essential for next-generation semiconductor and display applications. Our research encompasses the design and synthesis of metal, metal oxide, and metal nitride precursors, as well as the fabrication of high-quality thin films using atomic layer deposition (ALD) and chemical vapor deposition (CVD) techniques. Through these efforts, we aim to lead innovation across IT and ET convergence industries.
Our research is structured around four major focus areas.
(1) Inorganic precursors for semiconductors: We specialize in the synthesis of novel organometallic compounds—an area where we remain one of the only domestic groups—with applications in ALD and CVD processes for semiconductors, displays, and even catalysts in energy devices such as fuel cells and batteries.
(2) Organic materials for semiconductors: This includes the development of inhibitors and self-assembled monolayers (SAMs) for area-selective ALD (AS-ALD), as well as organic photoresist materials tailored for photolithography in semiconductor processing.
(3) Inorganic emissive materials for displays: We synthesize solution-processable perovskite nanoparticles and quantum dots for display applications such as LEDs, with particular emphasis on InGaP-based red QDs and TiO₂-based photocatalytic materials.
(4) Thin film deposition processes for semiconductors and displays: Leveraging the materials (1)-(3) we develop, we study ALD/CVD-based deposition techniques and apply them to prototype device fabrication. Our work includes the development of next-generation processes such as AS-ALD.
We have successfully transferred various technologies to industry, such as advanced metal precursor systems, transistors, capacitors, OLEDoS, perovskite, and hybrid composite materials. Our team, composed of experts in organometallic chemistry, organic chemistry, and materials science, has published over 80 papers in the last 5 years. With a strong collaborative network and comprehensive expertise from molecular design to device fabrication, we aim to be a global leader in material innovation for future electronics.
반도체/디스플레이 소재 연구팀에서 개발해온 전구체에 쓰인 원소들 (>42종)
Semiconductor Materials
Display Materials
Building N1, 141, Gajeong-ro, Yuseong-gu, Daejeon, Republic of Korea (Tel) +82-42-860-7929 (E-mail) ykkim@krict.re.kr
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