Equipment

CMP Machine for 4" Wafer

POLI-400, G&P Technology

Post-CMP Cleaner

Self-made

Desktop Polisher

For ECMP, Self-made

4-Point Probe System

CMT-100S, AIT

pH meter

DO meter

Thermal Imaging Camera

Precise scale

Res. 0.1 mg

DI Water Generator

Dream Plus

COMSOL Multiphysics

Mechanics & CFD & Design

Stirrer

Magnetic Stirrer

Temperature control

AC Power Supply

Compressor

DC Power Supply

Potentiostat

UV System

3D Printer

Thickness measuring system

TM2, SJT