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Microelectronics and MEMS Laboratory Department of Electrical Engineering and Centre for NEMS and Nanophotonics, IIT Madras
Email ID: enakshi@iitm.ac.in
Ph. No.: 044-2257 4438
Ph. No.: 044-2257 4438
Enakshi Bhattacharya received the M.Sc. degree in physics from the Indian Institute of Technology (IIT) Bombay, India, in 1980, and the Ph.D. degree from the Tata Institute of Fundamental Research, India, in 1985.,She was a Post-Doctoral Fellow with the National Renewable Energy Laboratory (then SERI), USA, from 1986 to 1988. She was a Faculty Member with the Department of Physics, IIT Kanpur, India, from 1988 to 1991. Since 1991, she has been on the Faculty of the Department of Electrical Engineering, IIT Madras, India, in 2000 with the Micromachined Products Division of Analog Devices, USA, and a semester at IIT Mandi, Mandi, in 2017. She played a key role in establishing the Centre for NEMS and Nanophotonics, funded by the Ministry of Electronics and Information Technology, Government of India, IIT Madras, in 2011. Her expertise is in silicon processing and its interdisciplinary applications. Her current research areas are in MEMS/NEMS, BioMEMS, and biosensors.(Based on document published on 19 February 2019).
Areas of Interest
MEMS processing and sensors: Surface and Bulk Micromachining, Test structures for parameter extraction and reliability, Measurement and modeling of stiction. Pressure sensors - piezoresistive and Knudsen force based.
Biosensors and MEMS: Electrolyte insulator semiconductor capacitor (EISCAP) to estimate Triglycerides and Urea concentrations using enzymatic hydrolysis. Complete system using miniaturized EISCAPs and readout circuit.
Micro/Nano cantilever based sensors.
Silicon nanoporous membranes for dialysis
Material and devices made of different forms of silicon - amorphous, porous, polycrystalline.
Administrative and organizational experience
Member, Research Council (RC) of CSIR-CEERI, Pilani, 2021-2023
Member FIST, DST, 2015-2020
Additional Director (non-executive), SPEL Semiconductor Ltd, Chennai, 2014
Additional Director (non-executive), Chiptest Engineering Ltd, Chennai, 2012
Member, Board of Governors, NIT, Puducherry, 2012 - 2015
Head, Department of Electrical Engineering, IIT Madras, 2010 - 2013. Chair,
Complaint Committee on sexual harassment, 2007-2011.
President, Film Club of IIT Madras, 2007-2010. Member, Institute Environment Committee, 2007-2009. Member, Institute Grievance committee, 1996-1997.
Member, Strategic Planning committee, 1996.
Warden,Sarayu Hostel, 1992-1995.
Organiser/ Co-organiser
Member Technical committee IEEE Sensors 2019. Track Co-chair Optical Sensors
Member Technical committee IEEE Sensors 2018. Track Co-chair Optical Sensors Co-chair: Women's Leadership Forum, IEEE Sensors 2018, New Delhi, India, October 28 to 31, 2018
Co-chair, International workshop on Micro/Nano 2D-3D Fabrication, Manufacturing of Electronic -Biomedical Devices and Application, IIT Mandi, 31st Oct to 2nd Nov, 2018
Chair with A. DasGupta, International Conference on MEMS and Sensors (ICMEMSS 2014), Indian Institute of Technology Madras, Chennai, December 18-20, 2014
Chair of the Theme Symposium on Nanomaterials: Devices and Applications, International Union of Materials Research Societies-International Conference in Asia (IUMRS-ICA 2013), Bangalore, December 16-20, 2013
International Workshop on the Physics of Semiconductor Devices,IWPSD-2003, IIT Madras. Joint Secretary, Member- Steering Committee.Technical Co-chair – Programme on Sensors and MEMS: IWPSD-2003, 2007, 2009. Member- Steering Committee, 2013
Member: International Advisory Committee of Porous Semiconductors Science and Technology, PSST-2010, Spain
Member of Programme Committee of SPIE's Photonics West, Micromachining and Microfabrication Symposium - Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS, San Jose, 2007, 2008, 2009 and San Francisco, 2010.
Technical Chair, International Conference on MEMS, ICMEMS 2009, IIT Madras, 3-5 Jan, 2009. Member, Editorial Board of the J. of the Indian Society for Smart Structures Membership of Societies: Life member, Semiconductor Society of India Life member, Indian Society for Smart Structures Life Member, TIFR Alumni Association Member, SPIE Senior Member, IEEE
Teaching
UG courses on Electromagnetic Fields, Semiconductor Devices, Device Modeling, Electrical Sciences II , Quantum Electronics and Lasers.
PG Courses on Device Modeling, VLSI Technology, Solid State Physics.
Characterization of Semiconductor Materials and Devices
Amorphous and Poly-crystalline Silicon
MicroElectroMechanical Systems (MEMS)
Solar cells - with S. Ashok (visiting Prof.)
Conducted UG and PG laboratories in both Physics and Electrical Engineering Departments.
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