Traditional mechanical transmission structures usually fail to meet the strict requirements of positioning. Therefore, piezoelectric actuators are widely used in precision positioning, However, Piezoelectric actuators exhibit a considerable hysteresis effect called the piezoelectric effect, a part of the applied voltage is consumed by the hysteresis effect because of the nature of the piezoelectric material; moreover, this effect is difficult to overcome because it is rate dependent. To overcome this problem, this work aims to identify the model of a piezo-actuated stage, and compensate the nonlinear hysteresis through different control design.