Technology, Research, & Development Project 1

Miniature scan mechanisms for wide angular deflection and large axial displacements

Aim 1: Design parametric resonance devices for wide deflection angles and large axial displacements

Aim 2: Develop high work density thin-film PZT materials for random access scanning

Aim 3: Establish electrothermal actuator to produce large axial displacements with linear motion

Parametric resonance

Parametric resonance actuators achieve fast scan speeds in the X,Y, and Z axes in a monolithic device with a small footprint. These devices can be tuned to “switch” operation between wide lateral deflections and large axial displacements.

Thin-film PZT

Thin-film PZT actuators can perform precise control of the focus. The materials possess high work density to generate large forces using low voltages. The focus can be positioned with accuracy on the sub-nanometer scale for random access scanning.

Electrothermal

Electrothermal actuators can generate large forces using low drive voltages to produce unprecedented axial displacements and hence tissue imaging depths. These actuators are easy to control, scalable in size, and compact in structure.

Design, configuration, and performance of TR&D1 scanning mechanisms. Scanning capabilities of representative parametric resonance (PR), thin-film lead-zirconate-titanate (PZT), and electrothermal (ET) devices for 2- and 3-axis beam scanning in microendoscopy.

A) The Lurie Nanofabrication Facility (LNF) provides a state-of-the-art clean room with modern equipment for device fabrication, including a wide range of silicon etching and deposition processes. B) Microsystems scan mechanisms have many advantages for use in microendoscopes, including small form factor, high scan speeds, and flexible focus control. Small mass limits sensitivity to disturbance from external movements. Batch fabrication processes allow for low cost devices (<$30-$100 each).

Publications

Birla M, Zou J, Afkhami Z, Duan X, Li H, Wang TD, Oldham KR. Multi-photon 3D imaging with an electrothermal actuator with low thermal and inertial mass. Sensors and Actuators A:Physical 2021;329:112791. Sensors
Birla M, Duan X, Li H, Lee M, Li G, Wang T, Oldham K. Image processing metrics for phase identification of a multi-axis MEMS scanner used in single pixel imaging. IEEE/ASME Trans Mechatronics 2020;26:1445-1454. PMC8293905.
Chen Y, Lee M, Birla M, Li H, Li G, Duan, X, Wang TD, Oldham KR. Motion Estimation for a Compact Electrostatic Micro-scanner via Shared Driving and Sensing Electrodes in Endomicroscopy. IEEE Transactions on Mechatronics 2020;25:661-72. PMC7831447.
Chen Y, Li H, Qiu Z, Wang TD, Oldham KR. Improved Extended Kalman Filter Estimation using Threshold Signal Detection with a MEMS Electrostatic Micro-Scanner. IEEE Transactions on Industrial Electronics 2020;67:1328-36. PMC8340920.
Zhu Y, Birla M, Oldham KR, Filipov ET. Elastically and plastically foldable electrothermal micro-origami for controllable and rapid shape morphing. Advanced Functional Materials 2020;30:2003741. Materials.
Li H, Barnes P, Harding E, Duan X, Wang TD, Oldham KR. Large-Displacement Vertical Electrostatic Microactuator Dynamics using Duty-Cycled Softening/Stiffening Parametric Resonance. J Micromechanics and Microengineering 2019;28:351-61. PMC7451138.
Li H, Oldham KR, Wang TD. 3 degree-of-freedom resonant scanner with full-circumferential range and large out-of-plane displacement. Optics Express 2019;27:16296-16307. PMC6825615.
Choi J, Wang TD, Oldham KR. Dynamics of thin-film piezoelectric microactuators with large vertical stroke subject to multi-axis coupling and fabrication asymmetries. J Micromechanics and Microengineering 2018;28:015014. PMC6104405.
Li G, Li H, Duan X, Zhou Q, Zhou J, Oldham KR, Wang TD. Visualizing Epithelial Expression in Vertical and Horizontal Planes With Dual Axes Confocal Endomicroscope Using Compact Distal Scanner. IEEE Transactions on Medical Imaging 2017;36:1482-90. PMID: 28252391.
Choi J, Duan X, Li H, Wang TD, Oldham KR. Multi-Photon Vertical Cross-Sectional Imaging With a Dynamically-Balanced Thin-Film PZT Z-Axis Microactuator. IEEE Journal of Microelectromechanical Systems 2017;99:1018-29. PMC5790190.
Li H, Qiu Z, Duan X, Oldham K, Kurabayashi K, Wang TD. Integrated Monolithic 3D MEMS Scanner for Switchable Real-time Vertical/Horizontal Cross-sectional Imaging in Dual Axes Confocal Endomicroscope. Optics Express 2016;24:2145-55. PMC5802237.
Shahid W, Qiu Z, Duan X, Li H, Wang TD, Oldham KR. Modeling and Simulation of a Parametrically Resonant Micro-Mirror with Duty-Cycled Excitation. IEEE J of Microelectromechanical Systems 2014;23:1440-53. PMC4262121.
Choi J, Qiu Z, Rhee CH, Wang TD, Oldham KR. A three‐degree‐of‐freedom thin‐film PZT‐actuated microactuator with large out‐of‐plane displacement. Journal of Micromechanics and Microengineering 2014;24:075017. PMC4262122.
Qiu Z, Rhee CH, Choi J, Wang TD, Oldham KR. Large Stroke Vertical PZT Microactuator with High-Speed Rotational Scanning. IEEE J of Microelectromechanical Systems 2014;23:256-58. PMC4262091.
Rhee CH, Pulskamp JS, Polcawich RG, Oldham KR. Multi-Degree-of-Freedom Thin-Film PZT-Actuated Microrobotic Leg. IEEE Journal of Microelectromechanical Systems 2012;21:1492-1503. IEEE.
Chen Y, Li H, Qiu Z, Wang TD, Oldham KR. Improved Extended Kalman Filter Estimation using Threshold Signal Detection with a MEMS Electrostatic Micro-Scanner. IEEE Transactions on Industrial Electronics 2020;67:1328-36. PMC8340920.
Oldham K, Lin X, Qiu Z, Wang T, Pulskamp JS, Polcawich RG. Dynamics, sensing, and control of a thin-film piezoelectric vertical micro-stage. In Dynamic Systems and Control Conference 2010:44182:111-118. ASME.

Report abuse