Scope

This conference provides an opportunity for the presentation and discussion of the latest advances in modeling and simulation of semiconductor devices, processes, and equipment for integrated circuits.

Topics:

1. Modeling and simulation of semiconductor devices

2. Modeling and simulation of semiconductor processes

3. Fundamental aspects of modeling and simulation

4. Compact modeling for circuit simulation

5. Process/device/circuit co-simulation

6. Equipment, topography, lithography modeling

7. Interconnect modeling

8. Numerical methods and algorithms

9. Metrology for modeling