MEMS Type PEH Simulation

Piezoelectric Simulations with COMSOL Multiphysics

• COMSOL Video

• COMSOL Blog: New Piezoelectric Modeling Interface in COMSOL 5.0

• Youtube Video: COMSOL Hands-On workshop on MEMS Simulation

• COMSOL: Piezoelectric Shear-Actuated beam

Thin Film BAW Composite Resonator

• COMSOL: Thin-Film BAW Composite Resonator. Application ID: 57845784

  • PDF Tutorial File

  • YouTube Video

• Josh Melnick Tutorial

  • Youtube Video: Bulk Acoustic Wave BAW COMSOL simulation Training Video

  • Tutorial Document: Simulation Instruction Frequency domain

• Hamid Jabbar's Tutorial

  • Tutorial Document: Frequency domain simulation of Piezoelectric MEMS Sensor

  • COMSOL MEMS Model File [COMSOL V 5.3a]

Impedance Graph

• How to calculate the impedance Z vs frequency.

• COMSOL Forum: Impedance, phase, and terminals

• Note that if you don't use abs( ) and don't have damping in your model, the result is imaginary and your plot shows nothing.