Design specific joint optimization of masks and sources on a very large scale

Post date: Apr 18, 2011 4:57:12 PM

K. Lai, M. Gabrani, D. DeMaris, N. Casati, A. Torres, S. Sarkar, P. Strenski, S. Bagheri, D. Scarpazza, A. E. Rosenbluth, D. O. Melville, A. Wächter, J. Lee, V. Austel, M. Szeto-Millstone, K. Tian, F. Barahona, T. Inoue and M. Sakamoto, Proc. SPIE 7973, 797308 (2011)