Patents & Publications

Patents filed

• A. Nigam, V. Sahu, Priyanka, P. K. Menon, Prem Pal, “A Method of Fabrication of Through-Holes in a Borofloat Glass Wafer” (filed on 26-11-2024., Indian patent application no. 202411084674)

• Prem Pal and Kazuo Sato, “Fabrication methods for Silicon Microstructures” (filed on 23rd July 2009, Japanese patent application no. 2009-172553).

• Prem Pal and Kazuo Sato, “Method of Fabricating Suspended Silicon Microstructures and Microfluidic Channels” (filed on 8th Dec. 2008, Japanese patent application no. 2008-312338).

• Prem Pal and Sudhir Chandra, “Fabrication Method of Microstructures with Perfect Convex Corners” (filed on March 18, 2004, Indian patent application no. 508/DEL/2004)

• Prem Pal, Sudhir Chandra, and Suneet Tuli, “Microelectromechanical Device with Recessed Micromechanical Structure, and Fabrication Method Thereof” (filed on 13th Jan. 2003, Indian patent application no. 39/DEL/2003).

Book

• Silicon Wet Bulk Micromachining for MEMS (Authors: Prem Pal and Kazuo Sato), Pan Stanford Publishing, Singapore, pp. 412 pages, 2017

International Journals 

Review Articles

• Prem Pal, V. Swarnalatha, A. V. Narasimha Rao, A. K. Pandey, H. Tanaka, and K. Sato, “High Speed Silicon Wet Anisotropic Etching for Applications in Bulk Micromachining: A Review”, Micro and Nano Systems Letters, vol. 9, no.4, pp. 1-59, Feb. 2021.

• S. S. Singh, Prem Pal, A. K. Pandey, Y. Xing, K. Sato, “Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS: A Review”, Micro and Nano Systems Letters, vol. 4, no. 5, pp.1-29, June 2016.

• Prem Pal and K. Sato, “A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching”, Micro and Nano Systems Letters, vol. 3, no.1, pp. 1-42, May 2015.

• Prem Pal, K. Sato and S. Chandra, “Fabrication techniques of convex corners in (100)-silicon wafer using bulk micromachining: A Review”, Journal of Micromechanics and Microengineering, vol. 17, no. 10, pp. R111-R133, October 2007.

• Prem Pal, Y.-J. Kim, and S. Chandra, “Front-to-back alignment techniques in microelectronics/MEMS fabrication: A Review”, Sensor Letters, vol. 4, no. 1, pp.1-10, March 2006.

Research Papers

• S. K. Jujjuvarapu, A. Ashok, Prem Pal, A. K. Pandey, “Design and fabrication of leaf-based microcantilever beams”, Microsystem Technologies, vol., pp., Dec, 2024.

• V.Sahu; P. Dewangan; R. V. Vardhan; P. K. Menon, and Prem Pal, “Fabrication of microchannels and through-holes in Borofloat glass using Cr thin film with positive photoresist as the masking layer through wet etching”, Materials Today Communications, vol. 41, pp. 110352, Dec, 2024.

• S. K. Jujjuvarapu, L. Devsoth, A. Ashok, Prem Pal, A. K. Pandey, “Frequency and Damping Analysis of Hexagonal Microcantilever Beams,” Sensors and Actuators A, vol. 375, pp. 115542(1-18), Sept. 2024.

• V.Sahu; P. Dewangan; R. V. Vardhan; V. Rinfela; P. K. Menon, and Prem Pal, “A study on chromium thin film with positive photoresist as a masking layer towards the wet bulk micromachining of Borofloat glass”, Micro and Nano Systems Letters, vol. 12, pp. 1-12, July 8, 2024.

• P. Dewangan, S. Purohit, V. Sahu, R. V. Vardhan, M. Peddigari and Prem Pal, “Fabrication of the microfluidic channels in silicon wafers using isotropic wet etching method: The impact of the composition of HNA solution on etching”, Microsystem Technologies, vol., no., pp. published 16th May 2024.

• A. Nigam, V. Sahu, Priyanka, P K. Menon, Prem Pal, “Study of masking layer behavior towards bulk micromachining of Borofloat glass”, Materials Today, vol. 92,  pp  823-828, Jan 2023

• MLV Mahesh, Prem Pal, VVB Prasad, and AR James, “Fatigue and leakage current characteristics of lead free bilayer thin film structures, “Ceramics International”, vol. 48, no. 7, pp. 9006-9013, April 2022.

• S. Purohit, V. Swarnalatha, A. K. Pandey, and Prem Pal, “Wet Anisotropic Etching Characteristics of Si{111} in NaOH-based Solution for Silicon Bulk Micromachining”, Micro and Nano Systems Letters, vol. 10, no. 21, pp. 1-10, December 2022.

• S. Purohit, V. Swarnalatha, A.K. Pandey, R. K. Sharma, and Prem Pal, “Wet bulk micromachining characteristics of Si{110} in NaOH-based solution”, Journal of Micromechanics and Microengineering, vol. 32, no. 12, pp. 124001 (12pp), November 2, 2022.

• V. Swarnalatha, S. Purohit, Prem Pal, and R. K. Sharma “Enhanced etching characteristics of Si{100} in NaOH-based two-component solution”, Micro and Nano Systems Letters, vol. 10, no. 10, pp.1-8, Aug. 2022.

• MLV Mahesh, Prem Pal, VVB Prasad, and AR James, “Improved Tunability and Energy Storage Density Properties of Low-Loss, Lead-Free (Ba0.50Sr0.50)TiO3 and Ba(Zr0.15Ti0.85)O3 Bilayer Thin Film Stacks”, Journal of Electronic Materials, 51(2), pp. 727-735, February 2022.

• A. Biswas, V. Pawar; K. Menon, Prem Pal, and A. K. Pandey, “Influence of fabrication tolerances on performance characteristics of a MEMS Gyroscope”, Microsystem Technologies, vol. 27, no. 7, pp. 2679-2693, July 2021.

• A. Gupta, Prem Pal, C.S. Sharma, “Pyramid textured Si{100} surface with low reflectivity in CMOS compatible solution”, Micro & Nano Letters, vol. 15, no. 15, pp. 1084-1088,  Dec. 2020.

• MLV Mahesh, Prem Pal, VVB Prasad, and AR James, “Improved properties & fatigue resistant behaviour of Ba(Zr0.15Ti0.85)O3 ferroelectric ceramics”, Current Applied Physics, vol. 20, no. 12, pp. 1373-1378, Dec. 2020.

• P. M. Kumar, A. Ashok, Prem Pal, A. K. Pandey, Frequency tuning of weakly and strongly coupled micromechanical beams”, ISSS Journal of Micro and Smart Systems, vol. 9, pp. 117-130, Nov. 2020.

• P. K. Menon, A. V. Narasimha Rao, A. L. Murthy, A. K. Pandey, and Prem Pal, “Study of high speed etching of silicon in KOH + NH2OH Solution at lower temperatures for the fabrication of through holes in silicon wafer”, Micro & Nano Letters, vol. 15, no. 6, pp. 365 - 369, May 2020.

• P. K. Menon, A. Ashok, A. V. Narasimha Rao, A. K. Pandey, and Prem Pal, “Effect of concentration change of 0.1% Triton added 25 wt% TMAH during Fabrication of deep cavities with mesa structures in SOI wafer”, Microelectronic Engineering, vol. 227, no. , pp. 111313 (6pp),  April 2020.

• A. Ashok, R. P. Nighot, L. Devsoth, M. Yadav, Prem Pal, and A. K. Pandey, “Experimental and theoretical analysis of drag forces in micromechanical beam arrays”, Physical Review Applied, vol. 13, no. 3, pp. 034003, March 2020.

• V. Swarnalatha, Prem Pal, A. K. Pandey, A. V. Narasimha Rao, Y. Xing, H. Tanaka, and K. Sato, “Systematic study of the etching characteristics of Si{111} in modified TMAH,” Micro & Nano Letters, vol. 15, no. 1, pp. 52-57, January 2020.

• V. Swarnalatha, KT Vismaya, A. V. Narasimha Rao, Prem Pal, A. K. Pandey, H. Tanaka, and K. Sato, “Etching mechanism behind the high speed etching of silicon in NH2OH-added alkaline solutions”, IEEJ Transaction on Sensors and Micromachines, vol. 140, no. 1, pp. 24-30, Jan. 2020

• V. S. Pawar, P. K. Menon, A L. Murthy, Prem Pal, A.K Pandey, “Influence of scalloping on electrostatic forces in comb drive microdevices”, ISSS Journal of Micro and Smart Systems, vol. 8, no. 2, pp. 127-134, November 2019.

• A. V. N. Rao, Prem Pal, V. Swarnalatha, A. K. Pandey, P. K. Menon, H. Tanaka
  K. Sato, “Aging effects of KOH+NH2OH solution on the etching characteristics of silicon”, ECS Journal of Solid State Science and Technology, vol. 8, no. 11, pp. p685-p692, Nov. 2019.

• A. Ashok, R. P. Nighot, N. K. Sahu, Prem Pal, A. K. Pandey, “Design and analysis of microcantilever beams based on arrow shape”, Microsystem Technologies, vol. 25, no. 11, pp. 4379-4390, Nov 2019.

• A. Gupta, Prem Pal, C.S. Sharma, “Surface texturing of Silicon {100} in an extremely low concentration TMAH for minimized reflectivity”, ECS Journal of Solid State Science and Technology, vol. 8, no. 10, pp. p622-p628, Oct 2019.

• A. Gangele, A. Ashok, C. S. Sharma, Prem Pal and A. K. Pandey, “Frequency analysis of hexagonal microbeam with 2D nanofiber mat”, Materials Research Express, vol. 6, no. 8, June 2019.

• A. V. Narasimha Rao, V. Swarnalatha, A. K. Pandey, and Prem Pal, “Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern”, Micro and Nano Systems Letters, vol. 6, no. 4, pp. 1-9, Dec. 2018.

• A. Ashok, P. M. Kumar, Prem Pal, and A. K. Pandey, “An idea of oscillating alphabets through mechanical coupling,” ISSS Journal of Micro and Smart Systems, vol. 7, no. 2, pp. 145-150, October 2018

• S. S. Singh, D. K. Nair, A. Rajagopal, Prem Pal, and A. K. Pandey, “Dynamic analysis of microbeams based on modified strain gradient theory using differential quadrature method,” European Journal of Computational Mechanics,” vol. 27, no. 3, pp. 187-203, July 2018.

• A. Ashok, G. Aparna, Prem Pal, A. K. Pandey, “An Analysis of Stepped Trapezoidal Shaped Microcantilever beams for MEMS based Devices,” Journal of Micromechanics and Microengineering, vol. 28, no. 6, pp. 085003 (8pp), June 2018.

• V. Swarnalatha, A. V. Narasimha Rao, and Prem Pal, “Effective improvement in the etching characteristics of Si{110} in low concentration TMAH solution,” Micro & Nano Letters, vol. 13, no. 8, pp. 1085-1089, August 2018.

• A. Ashok, P. M. Kumar, S. S. Singh, P Raju, Prem Pal, A. K. Pandey, “Achieving Wideband Micromechanical System using Coupled Non-Uniform Beams Array,” Sensors and Actuators A, vol. 273, pp. 12-18, April 2018.

• A. V. Narasimha Rao, V. Swarnalatha, A. Ashok, S. S. Singh and Prem Pal, “Effect of NH2OH on etching characteristics of Si{100} in KOH solution,” ECS Journal of Solid State Science and Technology, vol. 6, no. 9, pp. P609-P614, Aug 2017.

• V. Swarnalatha, A. V. Narasimha Rao, A. Ashok, S. S. Singh and Prem Pal, “Modified TMAH based etchant for improved etching characteristics on Si{100} wafer,” Journal of Micromechanics and Microengineering, vol. 27, no. 8, pp. 085003 (8pp), June 2017.

• S.S. Singh, V. N. Avvaru, S. Veerla, A.K. Pandey and Prem Pal, “A measurement free pre-etched patterns to identify the <110> directions on Si{110} wafer, Microsystem Technologies, vol. 23, no. 6, pp. 2131-2137, June 2017.

• A. V. Narasimha Rao, V. Swarnalatha, and Prem Pal, “Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS”, Micro and Nano Systems Letters, vol. 5, no. 23, pp. 1-9, May 2017.

• A. Ashok and Prem Pal, “Silicon micromachining in 25 wt% TMAH without and with surfactant concentrations ranging from ppb to ppm”, Microsystem Technologies, vol. 23, no. 1, pp. 47-54, Jan 2017.

• S. S. Singh, Prem Pal, and A. K. Pandey, “Mass sensitivity of non-uniform microcantilever beams”, Journal of Vibration and Acoustics, vol. 138, no. 6, pp. 064502 (7pages), Aug., 2016.

• M. A. Gosalvez, Y. Li, N. Ferrando, Prem Pal, K. Sato, Y. Xing, “Fluctuations during anisotropic etching: Local recalibration and application to Si{110},” IEEE Journal of Microelectromechanical Systems, vol. 25,  no. 4, pp. 788-798, Aug. 2016.

• S. S. Singh, V. Swarnalatha, V. Sharma, A. Pandey, and Prem Pal, “Precise identification of <100> directions on Si{001} wafer using a novel self-aligning pre-etched technique, Journal of Micromechanics and Microengineering, vol. 26, no. 2, pp. 25012(5pp), Feb. 2016.

• A. Ashok and Prem Pal, “Investigation of room temperature deposited silicon dioxide thin films for the surface texturization of monocrystalline {100} silicon”, Micro & Nano Letters, vol. 11, no.1, pp. 62-66, Jan. 2016.

• S. S. Singh, Prem Pal, and A. K. Pandey, “Pull-in Analysis of Non-uniform Microcantilever Beams under Large Deflection”, Journal of Applied Physics, vol.118, no. 20, pp. 204303 (1-10), Nov. 2015.

• K.C. Das, S. P. Ghosh, N. Tripathy, G. Bose, A. Ashok, Prem Pal, D. H. Kim, T. I. Lee, J. M. Myoung, and J. P. Kar, “Surface and interface studies of RF sputtered HfO2 thin films with working pressure and gas flow ratio”, J Mater Sci: Mater Electron, vol. 26, pp. 6025-6031, 2015.

• V. Sudharshan, Prem Pal, and S. Asthana, “Influence of A-site cation disorder on structural and magnetocaloric properties of Nd0.7–xLaxSr0.3MnO3 (x=0.0, 0.1, 0.2 & 0.3)”, Journal of Rare Earths, 33 (10). pp. 1072-1080, 2015.

• H. Zhang, Y. Xing, M. A. Gosálvez, Prem Pal, and K. Sato “Removal probability function for Kinetic Monte Carlo simulations of anisotropic etching of silicon in alkaline etchants containing additives”, Sensors and Actuators A, vol. 233, pp. 451-459, Sept. 2015.

• Prem Pal, A. Ashok, S. Haldar, Y. Xing, and K. Sato, “Anisotropic etching in low concentration KOH: Effects of surfactant concentration”, Micro & Nano Letters, vol. 10, no. 4, pp. 224-228, April 2015.

• Y. Li, M.A. Gosalvez, Prem Pal, K. Sato, Y. Xing, “Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching" Journal of Micromechanics and Microengineering, vol. 25, no. 5, pp. 055023 (13pp), May 2015.

• A. Ashok and Prem Pal, “Synthesis of anodic oxide thin films on Si{100} wafers and their characterization in TMAH for MEMS”, ECS Journal of Solid State Science and Technology, vol. 4, no.2, pp. Q1-Q7, 2015.

• A. Ashok and Prem Pal, “Investigation of anodic silicon dioxide thin films for MEMS applications”, Micro & Nano Letters, vol. 9, no. 12, pp. 830-834, Dec. 2014.

• Prem Pal, M. A. Gosalvez, K. Sato, H. Hida and Y. Xing, “Anisotropic etching on Si{110}: Experiment and simulation for the formation of microstructures with convex corners" Journal of Micromechanics and Microengineering, vol. 24, no. 12, pp.125001 (12pp), Dec. 2014.

• Prem Pal, S. Haldar, S. S. Singh, A. Ashok, Y. Xing and K. Sato, “A detailed investigation and explanation to the appearance of different undercut profiles in KOH and TMAH", Journal of Micromechanics and Microengineering, vol. 24 , no. 9 , pp.095026 (9pp), 2014.

• B. Tang, M. Q. Yao, G. Tan, Prem Pal, K. Sato, W. Su, Smoothness control of wet etched Si{100} surfaces in TMAH+Triton”, Key Engineering Materials 609, 536-541, 2014.

• V. Sudharshan, T. Durga Rao, Prem Pal, and S. Asthana, Study of structural effect on Eu-substituted LSMO manganite for high temperature coefficient of resistance, Physica B: Condensed Matter, vol. 448, no. 1, pp. 277-280, Sept. 2014.

• A. Ashok and Prem Pal, “Growth and etch rate study of low temperature anodic silicon  dioxide thin films", The Scientific World Journal, vol. 2014, pp. 106029 (9pp), Feb. 2014.

• Prem Pal and S. S. Singh, “A new model for the etching characteristics of corners formed by Si{111} planes on Si{110} wafer surface”, Engineering, vol.5, no.11A, pp. 1-8, Nov. 2013.

• Prem Pal and S. S. Singh, “A simple and robust model to explain convex corner undercutting in wet bulk micromachining”, Micro and Nano Systems Letters, vol. 1, no. 1, pp. 1-6, Aug. 2013.

• S. Vadnala, S. Asthana, Prem Pal and S. Srinath, “Influence of Nd substitution by La in Nd0.7Sr0.3MnO3 on structural and transport properties for sensing applications” ISRN Materials Science, pp. 1-10, 2013.

• Prem Pal, M. A. Gosalvez and K. Sato, “Etched profile control in anisotropic etching of silicon by TMAH+Triton,” Journal of Micromechanics and Microengineering, vol. 22, no. 6, pp. 065013 (9pp), June 2012.

• M. A. Gosalvez, Prem Pal, N. Ferrando, H. Hida, and K. Sato, “Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples,” Journal of Micromechanics and Microengineering, vol. 21, no. 12, pp. 125007 (14pp), Dec. 2011.

• M. A. Gosalvez, Prem Pal, N. Ferrando, and K. Sato, “Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples,” Journal of Micromechanics and Microengineering, vol. 21, no. 12, pp. 125008 (12pp), Dec 2011.

• M. A. Gosalvez, Prem Pal, and K. Sato, “Reconstructing the 3D etch rate distribution of silicon in anisotropic etchants using data from vicinal {100}, {110} and {111} surfaces,” Journal of Micromechanics and Microengineering, vol. 21, no. 10, pp. 105018 (17pp), Oct. 2011.

• M. A. Gosalvez, N. Ferrando, Y. Xing, Prem Pal, K. Sato, J Cerda-Boluda and R.Gadea, “Simulating anisotropic etching of silicon in any etchant: evolutionary algorithm for the calibration of the continuous cellular automaton,” Journal of Micromechanics and Microengineering, vol. 21, no. 6, pp. 065017 (16pp), June 2011.

• Prem Pal, K. Sato, M. A. Gosalvez, B. Tang, H. Hida, and M. Shikida, “Fabrication of novel microstructures based on orientation dependent adsorption of surfactant molecules in TMAH solution,” Journal of Micromechanics and Microengineering, vol. 21, no. 1, pp. 015008 (11pp), Jan. 2011.

• Prem Pal and K Sato, “Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes,” Microsystem Technologies, vol. 16, no. 7, pp. 1165-1174, July 2010.

• B. Tang, M. Shikida, K. Sato, Prem Pal, H. Amakawa, H. Hida and K. Fukuzawa, “Study of surfactant-added TMAH for the applications in DRIE + wet etching based micromachining,” Journal of Micromechanics and Microengineering, vol. 20, no. 6, pp. 065008 (9pp), May 2010.

• Prem Pal and K. Sato: Extension of 3D shapes of MEMS structures realized by wet etching (Study of micromachining of single crystal silicon), Journal of the Japan Society of Mechanical Engineers C, vol.76, no.768, pp. 1899-1901, 2010.

• Prem Pal, M. A. Gosalvez and K. Sato, “Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide: etching mechanism and advanced application,” Japanese Journal of Applied Physics, vol. 49, pp. 056702 (9 pages), May 2010.

• M. A. Gosalvez, Prem Pal, B. Tang, and K. Sato, “Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions,” Sensors and Actuators A, vol. 157, no. 1, pp. 91-95, Jan. 2010.

• B. Tang, Prem Pal, M. A. Gosalvez, M. Shikida, K. Sato, H. Amakawa, and S. Itoh, “Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH”, Sensors and Actuators A, vol. 156, no. 2, pp. 334-341, Dec. 2009.

• M. A. Gosalvez, B. Tang, Prem Pal, K. Sato, Y. Kimura, and K. Ishibashi, “Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications, Journal of Micromechanics and Microengineering, vol. 19, no. 12, pp. 125011 (18pp), Dec. 2009.

• Prem Pal, K. Sato, M. A. Gosalvez, Y. Kimura, K. Ishibashi, M. Niwano, H. Hida, B. Tang, and S. Itoh, “Surfactant adsorption on single crystal silicon surfaces in TMAH solution: orientation-dependent adsorption detected by in-situ infra-red spectroscopy,” IEEE Journal of Microelectromechanical Systems, vol. 18, no. 6, pp. 1345-1356, Dec. 2009.

• Prem Pal and K. Sato, “Complex three dimensional structures in Si{100} using wet bulk micromachining”, Journal of Micromechanics and Microengineering, vol. 19, no. 10, pp. 105008 (9pp) October 2009.

• Prem Pal, K. Sato, M. Shikida and M. A. Gosalvez, “Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH”, Sensors and Actuators A, vol. 154, no. 2, pp. 192-203, Sept. 2009.

• Prem Pal and K. Sato, “Various shapes of silicon freestanding microfluidic channels and microstructures in one step lithography”, Journal of Micromechanics and Microengineering, vol. 19, no. 5, pp. (055003)1-11, May 2009.

• Prem Pal and K. Sato, “Suspended Si microstructures over controlled depth micromachined cavities for MEMS based sensing devices”, Sensor Letters, vol. 7, no. 1, pp. 11-16, February 2009.

• Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida, “Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants”, Journal of Micromechanics and Microengineering, vol. 17, no.11, pp. 2299-2307, November 2007.

• S. Chandra, V. Bhatt, R. Singh, P. Sharma and Prem Pal, “MEMS prototyping using RF sputtered films”, Indian Journal of Pure & Applied Physics, vol. 45, no. 4, pp. 326-331, April 2007.

• R. Mulaveesala, Prem Pal, and S. Tuli, Interface study of bonded wafers by digitized linear frequency modulated thermal wave imaging”, Sensors and Actuators A, vol. 128, no. 1, pp. 209-216, March 2006.

• H. Bahadur, S. B. Samanta, A. K. Srivastava, K. N. Sood, R. Kishore, R. K. Sharma, A. Basu, Rashmi, M. Kar, Prem Pal, V. Bhatt, S. Chandra, “Nano and micro structural studies of thin films of ZnO”, Journal of Material Science, vol. 41, no. 22, pp. 7562-7570, November 2006.

• Prem Pal and S. Chandra, “RF Sputtered Silicon for MEMS”, Journal of Micromechanics and Microengineering, vol. 15, no.8, pp. 1536-1546, August 2005.

• Vivekanand Bhatt, Prem Pal, and Sudhir Chandra “Feasibility study of RF sputtered ZnO film for surface micromachining,” Surface & Coatings Technology, vol. 198, pp. 304-308, August 2005.

• Prem Pal and S. Chandra, “Recessed microstructures with perfect convex corners for accelerometers”, Sensor Letters, vol. 2, no. 3-4, pp. 226-231, September 2004.

• Prem Pal and S. Chandra, “Bulk-micromachined structures inside anisotropically etched cavity”, Smart Material and Structures, vol. 13, no. 6, pp. 1424-1429, December 2004.

• Prem Pal and S. Chandra, “A novel process of perfect convex corner realization in bulk micromachining”, Journal of Micromechanics and Microengineering, vol. 14, no.10, pp. 1416-1420, October 2004.

• Prem Pal, S. Tuli, and S. Chandra, “A new technique of front-to-back alignment for MEMS”, Sensor Letters, vol. 2, no.1, pp.78-81, March 2004.

• Prem Pal, S. Tuli, and S. Chandra, “Design and fabrication of SiO2   micromechanical structures inside anisotropically etched cavity”, International Journal of Computational Engineering Science, vol.4, no.3, pp.489-492, September 2003.