Mantis HEX Modular Deposition Chamber

Features

• • Modular deposition chamber design

  • DC magnetron sputtering source (2" diameter) with Ar gas

  • Thermal evaporation source available

  • Thickness monitoring with quartz crystal monitor

  • Sample, quartz crystal monitor, and sputtering source shutters

  • Base pressure: ~ 1.9 x 10^-6 torr within 45 minutes of pump down