JSM-6010PLUS/LA Scanning Electron Microscope

Features

• • W-based thermionic source (Max voltage: 20 kV)

  • Secondary Electron Imaging (SEI), Backscattered Electron Imaging (BEI), & Energy Dispersive Spectroscopy (EDS) modes

  • Capable of dual imaging modes

  • Pump down time: < 5 min

  • SEI Resolution in HV mode: 4.0 nm (@ 20 kV), 8.0 nm (3 kV), & 15 nm (1 kV)

  • EDS mass / atomic accuracy: 0.5 % (atomic or mass)