Module needs to accommodate up to 32 MEMS sensors
Static positioning of 0G, 1G, and -1G (see Figure below)
Static testing on all 3 axes in 2 seconds
Constant Rotational Velocity of 600 degrees per second (100 RPM) for 15 degrees of rotation
Dynamic testing on all 3 axes in 3 seconds
Operate in temperature range of - 60°C to 160°C
Position Accuracy of 0.2°
Velocity Accuracy of 2%
17.6” x 6.5”, 3kg MEMS platform
Performances
Can accommodate up to 32 MEMS
Platform dimension 17.6" x 6.5"
Finishes testing on all 3 axes in approximately 8 sec
Performs dynamic tests between static tests
0.14 ° positional accuracy
Robust design
Remaining Concerns
Temperature requirements
Not all components can withstand -60 to 160 °C
Testing speed
Inside axis can only ramp up to 70 RPM
PID-controller stability
Recommendations
Temperature Requirements
Insulation of delicate components
Cooling fins for controllers
Improved Accuracy
Master-Slave controllers
Precise MEMS for homing sequence
Testing Time
Lighter components
Ball bearing maintenance
Cable Routing
Slip rings
Extended cables
Negotiable requirement
Executive Summary
The production of Micro Electric-Mechanical Systems (MEMS) sensors has increased tremendously in recent years, causing companies to focus on reducing the manufacturing cost of MEMS. This can be achieved by implementing an external stimulator that performs the necessary tests on multiple chips simultaneously. Furthermore, with the stimulator, the overall size of MEMS will be reduced due to the elimination of the internal tester.
The stimulator should be able to test up to 32 MEMS simultaneously. It also needs to perform both static and dynamic tests along all 3 axes in less than 2 and 3 seconds, respectively. For the dynamic tests, the speed requirement is 600°/s (100RPM) for duration of at least 15°. In addition, the accuracy of rotational position has to be less than 0.2°, and the accuracy of velocity has to be less than 2%. Along with the functional requirements of the stimulator, the design should be able to function in the temperature range of -60°C to 160°C. Also, to accommodate up to 32 devices and other electronics on-board, the dimension of the platform must be 17.6 x 6.5” and have a 3 kg mass.
The final design of this stimulator was machined from Aluminum 6061-T6, which functions within the temperature requirement without deforming. Aluminum 6061-T6 not only met the temperature requirement but also was inexpensive and readily available. An analysis was run to determine the necessary motor torque in order to meet the functional requirements listed above. For the inside motor, 1.91 Nm was required and for the outside motor, 7.64 Nm was required.
With the motors, controllers, and driver chosen, all the necessary simulation was complete, and the design was finalized. A two-axis gimbal was the final prototype design, and it will be able to perform all the required tests in less than 8 seconds.