Facilities

Excimer laser COMPex 102 248 nm KrF
PLD *2
Multimode AFM
Probe station
Ferroelectric tester TF3000
MR station up to 2T at room temperature

7. Clustered PVDs - 200 mm

Max Temperature: 500 °C
8 cathodes - 4 RF and 4 pulsed DC
ICP-RIE etching chamber connected

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