Micro-origami systems provide superior methods to build 3D microstructures and MEMS that cannot be built with traditional photolithography processes. In this research thrust, we develop advanced micro-fabrication process for complex 3D MEMS and micro-robots. The following YouTube video shows the superior shape morphing capability of our device, where a micro-crane is folded from flat to the 3D crane shape and then flap its wings. In addition to building micro-cranes (for fun), our device can form interlocked micro-grippers or sense the interaction with small scale samples. The simultaneous actuation and sensing capability allows these MEMS to be used for biomedical, micro-robotics, and surgery applications. 

Complex Shape Morphing Capability

Our micro-origami system is capable of achieving complex shape morphing in a highly controllable manner. The following YouTube video demonstrates an interlocked micro-origami gripper with ultra large gripping range. This gripper can assemble and lock itself at the functioning state using locking devices. After forming the 3D shape, the gripper can achieve ultra-large gripping motion that cannot be achieved with traditional MEMS. This work is published in Advanced Functional Material. 

Sensing Capability for Interacting with Small-Scale Samples

This research demonstrates that micro-origami MEMS with mixed transduction systems can achieve complex functionality such as sensing and actuating simultaneously. The following YouTube video demonstrates a micro-origami leg that can actively interact with small-scale samples and pick up sensing signals about the object. This capability is achieved through integrating thin-film lead zirconate titanate (PZT) transducers and piezoresistive/electrothermal transducers onto one micro-origami system. This work is published in Small.

Simulation for Micro-Origami and MEMS

In addition to working in a clean room to develop better MEMS, I also develop multi-physical simulation frameworks for the micro-devices I designed. For further information about my simulation work, please check out my paper in International Journal of Mechanical Science and my webpage on simulation. 

Related Publications:

1. Yi Zhu, Anan Ghrayeb, Joonyoung Yu, Yiwei Yang, Evgueni T. Filipov, Kenn Oldham, 2024, Mixed-Transducer Micro-Origami for Efficient Motion and Decoupled Sensing. Small. (DOI: https://doi.org/10.1002/smll.202400059)

2. Yi Zhu, Evgueni T. Filipov, 2021, Rapid Multi-Physics Simulation for Electro-Thermal Origami Systems, International Journal of Mechanical Sciences, 202-203, 106537. (DOI: https://doi.org/10.1016/j.ijmecsci.2021.106537)

3. Yi Zhu, Mayur Birla, Kenn Oldham, Evgueni T. Filipov. 2020. Elastically and Plastically Foldable Electrothermal Micro-Origami for Controllable and Rapid Shape Morphing.  Advanced Functional Material. 2003741. (DOI: https://doi.org/10.1002/adfm.202003741)

Media Coverage:

• Origami microbots: Centuries-old artfrom guides cutting-edge advances in tiny machines. 

• Engineers Develop a New Way to Design, Fabricate, and Actuate Micro-robots.

• U-M Researchers Create Shape-shifting Micro-Robots Using Origami Principles

• These Origami-Inspired Micro-robots can Execute Complicated Tasks.

• Origami Principles can Unlock the Potential of Tiny Robots.

• Teeny robots get a speed boost from origami.

• Origami Microbots: Centuries-old guides cutting-edge advances in tiny machines