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Precision Machining and Measurements
Precision Machining and Measurements
Precision Machining System
Precision Machining System
- Femtosecond Laser machining of flexible/multi-stacked electronics/optics
- 3D printing
Ultraprecision Measurement System
Ultraprecision Measurement System
- Dimensional metrology of semiconductor, display panel.
- Spectral metrology of atom/molecule/bio (Gas, particle detection)
- Dynamical metrology of ultrafast dynamics of electron, atom, and molecule systems
Precision Optical Devices
Precision Optical Devices
Ultrafast Coherent EUV/X-ray Pulse Generation
Ultrafast Coherent EUV/X-ray Pulse Generation
- Plasmonic High Harmonic Generation
- Solid High Harmonic Generation
- Nano/Micro-scale EUV/X-ray Light Sources
- EUV/X-ray Beam Shaping
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