MEMS Inertial Sensors
MEMS Gyroscope
MEMS Gyroscope
- Gyroscope is a part of inertial navigation system, for measuring the angular velocity of the rotating object.
- It is used to maintain the orientation of an object in any specific direction.
- MEMS gyroscope is a vibrating structure gyroscope based on Coriolis Effect.
- MEMS gyroscope consists of a mass which is usually allowed to vibrate in an axis and the rotation is applied perpendicular to this vibrating axis. As result of Coriolis Effect, the mass will experience a displacement perpendicular to both the vibration and rotation.
- This displacement after decoding gives the amount of rotation experienced.
MEMS Seismometer
MEMS Seismometer
- Seismometers are instruments used to detect and quantify motions on the ground including those generated by quakes and volcano eruptions.
- Seismometers operate on the principle of inertia – stationary objects remain stationary unless an external force is applied to them.
- MEMS Seismometer is made using Silicon on Glass (SoG) architecture.
- A proof mass is suspended by folded cantilever beams, with comb electrodes projecting out of the proof mass at right angles.
- The cantilever beams are anchored to the outer casing at its four respective ends.
- The proof mass with electrodes is movable and is designed to be sensitive to ground vibration in one direction.
- Sensitivity in one direction is due to the rectangular cross-sectional shape of the suspension beam.
- The low width of the beam compared to the length and thickness makes it more compliant in the sensing direction, and hence more sensitive to applied forces along that direction.