◈ Deposition ◈ Lithography ◈ Measurement ◈ Processing ◈
It is a vacuum chamber connecting with pulsed laser deposition (PLD) system and sputtering system. Using it, we can make various thin film structures!
It is a self-made sputter equipment in our lab. (thank Dr. Ha for your effort!) this system is capable of high temperature heat treatment as well as reactive gas injection.
VSM is a measuring equipment that outputs a MH curve by sensing the changed magnetic flex by vibrating the specimen.
We can newly design this magnetometer to measure the electrical resistance of specimens including metals, semiconductors, or something else during sweeping magnetic field! (thank Dr. Bao for your help!)
MOM is a microscopy that can visualize the surface information of a magnetic material based on magneto-optical Kerr effect (MOKE). It is also a self-made equipment in our lab. (thank Dr. Bao for your efforts!)
It has 6 probes independent of each other. Each can be an electric source or meter, and the settings for them are somewhat free! In addition, since it is equipped with temperature and magnetic field control functions, it is possible to evaluate various physical properties of materials.
Our lab sometimes handles bulk specimens. These tools can come in very useful when processing bulk samples!