Research

Research Area

Wide bandgap semiconductor materials: Ga2O3, SiC, Diamond, and III-nitrides

• Epitaxy of compound semiconductors for optoelectronic applications

• Single crystal growth for power electronics

• Fabrication/characterization/packaging of semiconductor devices

• Advanced lithography (nanoimprint/nanosphere/holographic lithography)

• Crystal analysis of thin films by high-resolution TEM and XRD

Applications of III-nitride semiconductors

Progress of power semiconductor device materials