1st German-Japanese
Plasma Processing Workshop
for Advanced Microelectronics
1. Deutsch-Japanischer Plasma-Processing Workshop für fortgeschrittene Mikroelektronik
第1回日独先端半導体プラズマプロセス研究会
Bochum, February 13-14, 2025
We look forward to welcoming you to the 1st German-Japanese Plasma Processing Workshop 2025 for Advanced Microelectronics (PPW2025) at the Ruhr University Bochum from February 13 to 14, 2025.
The hosts are the Chair of Microsystems Technology and the Chair of Applied Electrodynamics and Plasma Technology at Ruhr University Bochum in cooperation with Japan Science and Technology Agency (JST )’s “Adopting Sustainable Partnerships for Innovative Research Ecosystem (ASPIRE)” Project JPMJAP2321.
The venue is the ID building on the Ruhr University Bochum campus.
The aim of the workshop is to create a forum for open discussions between scientists in the field of plasma technology and microelectronics across national borders. Plasmas are used in about 45% of the manufacturing steps in leading microchip production. Such utilization requires a thorough understanding of the plasma environment and the interactions between plasma and surface. The event is aimed at scientists, process engineers, PhD students and industrial partners in the field of plasma etching, plasma treatment and plasma deposition for innovative semiconductor manufacturing processes. The topics include highlights from basic research, simulation, diagnostics, individual processes, process sequences and applied research. Issues relating to the introduction of new technologies into production will also be addressed.
The event will feature 30 invited talks and a poster session, providing a platform to discuss cutting-edge research, share insights and foster collaborations.
The workshop language is English.
Confirmed speakers
Prof. Dr. E. Kessels (Eindhoven University of Technology)
Prof. Tokyo Shimogaki (University of Tokyo)
Dr. Sven Zimmermann (Fraunhofer Institute ENAS)
Prof. Dr. A. Uedono (University Tsukuba)
Prof. Dr. A. von Keudell (Ruhr University Bochum)
Important dates
Submission of a contribution: until November 30, 2024
Information on the acceptance of the submitted contribution: December 09, 2024
Early Bird Registration for the workshop: November 1, 2024 - December 12, 2024
Late News Poster Abstract Deadline: January 10, 2025
End of registration for the workshop: January 15, 2025
Workshop: February 13-14, 2025
Contact
