Embedded Files
RF/DC Magnetron Sputtering System
RF/DC Magnetron Sputtering System
2 RF guns, 1 DC gun
Location: 01329
Atomic Layer Deposition System
Atomic Layer Deposition System
Lucida D100 (NCD)
TMA, H2O installed
Wafer size up to 6"
Max. Temperature 300 C
Location: 01329
Rapid Thermal Processing System
Rapid Thermal Processing System
RTP-1300 (ECOPIA)
Max. Temperature 1300 C
Location: 01329
Mask Aligner & Exposure System
Mask Aligner & Exposure System
MDA-400LJ (MIDAS SYSTEM)
LED I-Line UV source
Up to 4-inch sized wafer
Location: 01329-2
Digital Microscope
Digital Microscope
Eclipse LV-N (NIKON)
Location: 01329-2
Fume Hood with Spinner
Fume Hood with Spinner
Fume hood HMF-B (HANKOOK LAB SOLUTIONS)
Spinner GSF-100ZP (RHABDOS)
Location: 01329-2
Vacuum Oven
Vacuum Oven
S-VAC27-AP (SERIMA)
Vacuum Oven for Polyimide Curing
Location: 01329
Probe Station
Probe Station
Probe Station with Faraday Cage (MS-TECH)
4 micromanipulators with a microscope
Location: 01328
Temperature Controlled Vacuum Probing Stage
Temperature Controlled Vacuum Probing Stage
MPS-PT (NEXTRON)
Vacuum sealed container
Temp: -40 to 200 C
Location: 01328
Mini 5-DOF Robotic Arm
Mini 5-DOF Robotic Arm
Dobot Magician (DOBOT)
Location: 01328
Thermal Evaporation System
Thermal Evaporation System
Location: 01428
Oxygen Plasma Asher
Oxygen Plasma Asher
Location: 01428
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