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Conference
Conference
8. 2002 presentation
Fabrication and Electrical Characteristics of Carbon Nanotube Micro-cathodes for Use in a Parallel-Electron Beam Lithography system
K.B.K. Teo, G. Pirio, M. Chhowalla, P. Legagneux, S.-B. Lee , D.G. Hasko, H. Ahmed, D. Pribat, G.A.J. Amaratunga and W.I. Milne, presented at the 45rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication 28-31 May 2002, Anaheim, California, USA.