Highly Sensitive Dust Particle Detector using a Silicon Cantilever Microelectro-Mechanical System

Jae-Hyun Hwang, Taehoon Kang, Dong-kyo Shim, Bonghyun Park, Seung-Beck Lee

The 14th International Symposium on the Physics of Semiconductors and Applications

- 2008, NTA-P-36, August 27 2008, Ramada Plaza Jeju Hotel, Jeju, Korea.