Fabrication of NiSi2 nanocrystal charge storage layer on Si-Fin for nonvolatile memory application

Seong-Goo Ahn, Sung-Jin Choi, Chaehyun Lim, Bonghyun Park, Dong-Hoon Min, Seung-Beck Lee

The 14th International Symposium on the Physics of Semiconductors and Applications

- 2008, SIS-P-79, August 29 2008, Ramada Plaza Jeju Hotel, Jeju, Korea.