Effects of plasma-induced etch damage to channel surface in a-IGZO TFTs and post-treatment process for recovery

   Minjin Kwon, Hyoungbeen Ju, Jiyoung Bang, Hyeonjeong Sun, Sangdeok Kim, Yeonghun Lee, Onejae Sul and Seung-Beck Lee

KISM 2022, November 16, 2022 Paradise Hotel Busan, Busan, Korea