Optimization of Dry Etching in Vertical Field-effect Transistor Structure

   Yeonghun Lee, Hyoungbeen Ju, Jiyoung Bang, Minjin Kwon, 

Hyeonjeong Sun, Sangduk Kim, Onejae Sul and Seung-Beck Lee 

KISM 2022, November 14, 2022 Paradise Hotel Busan, Busan, Korea