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Conference
Conference
NanoKorea 2022
Effects of plasma-induced etch damage to channel surface in a-IGZO TFTs and post-treatment process for recovery
Dongseon Kim, Changjo Choi, Minjin Kwon, Hyongbeen Ju, Jiyoung Bang, Jinsil Gong,
Yeonsu Lee, Hyeonjeong Sun, Sangdeok Kim, Yeonghun Lee, Onejae Sul and Seung-Beck Lee
NANOKOREA 2022, July 7, 2022, KINTEX (Ilsan)