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Conference
Conference
NanoKorea 2022
Optimization of Dry Etching in Vertical Field-effect Transistor Structure
Jaehyun Hong, Jinwoo Lee, Yeonghun Lee, Hyoungbeen Ju,
Jiyoung Bang, Jinsil Gong, Yeonsu Lee, Minjin Kwon, Hyeonjeong Sun,
Sangduk Kim, Onejae Sul and Seung-Beck Lee
NANOKOREA 2022, July 7, 2022, KINTEX (Ilsan)