Conference

NanoKorea 2022

Optimization of Dry Etching in Vertical Field-effect Transistor Structure

 

   Jaehyun Hong, Jinwoo Lee, Yeonghun Lee, Hyoungbeen Ju, 

Jiyoung Bang, Jinsil Gong, Yeonsu Lee, Minjin Kwon, Hyeonjeong Sun, 

Sangduk Kim, Onejae Sul and Seung-Beck Lee

NANOKOREA 2022, July 7, 2022, KINTEX (Ilsan)