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NanoKorea 2021
Fabrication of IGZO nanowire by nanoscale spacer patterning
Hoyoung Lee, Jaewon Jung, Yeonsu Lee, Hyoungbeen Ju, Sunjin Kim, Jiyoung Bang, Jinsil Gong
Sehoon Oh, Minjin Kwon, Hyeonjeong Sun, Onejae Sul and Seung-Beck Lee
NANOKOREA 2021, July 7, 2021, KINTEX (Ilsan)