Sub-20 nm magnetic tunnel junction pillar fabrication for Ultra-high density Spin Transfer Torque Magnetic Random Access Memory

Youngbong Shin, Eungjun Kim, Hyungyu Lee, Sungwoo Chun, Bongho Kim, Daehong Kim, and Seung-Beck Lee,

Nano Korea Symposium 2012. August 16, 2012, COEX, Korea