Multi-step Ion Beam Etching of Sub-30 nm Scale Magnetic Tunnel Junctions for Reducing Leakage Path and MgO Barrier Damage

Sungwoo Chun, Daehong Kim, Jihun Kwon, Bongho Kim, Seonjun Choi and Seung-Beck Lee

56th Annual Conference on Magnetism and Magnetic Materials (MMM) 2011 , November 2, 2011, Scottsdale, Arizona, USA