Ion Beam Etching of sub-30 nm Scale Magnetic Tunnel Junctions for Spin Transfer Torque Magnetic Random Access Memory Application

Sungwoo Chun,Jihun Kwon,Bongho Kim, Daehong Kim, Seonjun Choi and Seung-Beck Lee

Nano Korea Symposium 2011. August 24, 2011, KINTEX, Korea