Fabrication of 10 nm Line-and-Space Nanoprobes using Multilayer Sidewall Deposition and Chemical-Mechanical Polishing

Seong-Kyu Kang, Byeong-Min Kim, Jihun Kwon, Eunsuk Choi, and Seung-Beck Lee

Nano Korea Symposium 2011, August 24, 2011, KINTEX, Korea