5. 2006 presentation

Shallow pattern generation in poly(methylmethacrylate)(PMMA) using low-energy electron beam source

PARK Bonghyun, LIM Chae Hyun, MIN Dong-Hoon, TAKATOSHI Yoshimoto, KIM Ho-Sub and LEE Seung-Beck,

한국물리학회 추계학술대회, E-18, 2006년 10월 20일, 대구 EXCO