Research Facilities
Research Facilities
Embedded Files
Device Fabrication Equipment
RF Magnetron Sputtering (Oxide)
RF Magnetron Sputtering (Si-related)
ICP-Reactive Ion Etching System
RF Plasma CVD
Atomic Layer Deposition
Diamond CVD
Electron beam deposition system
Resistive heating vapor deposition system
Draft Chamber
Gas lines (O2, H2, Ar, SF6, CF4)
Mask Aligner/Spin Coater
Muffle Furnace
Ultra pure water supply
Furnace Annealing system
Rapid Thermal Anneal system
UV Ozone system
Device Characterization Equipment
Atomic force microscopy system
Semiconductor Parameter Analyzer
LCR meter
Digital Microscope
Vacuum light irradiation prober
Vacuum low temperature prober
Prober (2 units)
Prober (Room Temp. and High Temp.)
Four point probe system
Spectrophotometer
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