RESEARCH

Hydrogen gas sensor: Free-standing sensing materials using self-heating mechanism

Piezoresistive force/torque sensor: Multi-axis force/torque sensor in a single structure

Piezoresistive pressure sensor: Metal diaphragm sensor for high pressure range

Electrostatic accelerometer

Electrostatic energy harvester

Refractive index sensor: Meta-structures and photonic crystals attached on an optical fiber cross section

Acoustic sensor: Optical microphone resistant to EMI environment