FACILITIES

Mask Alinger (Canon)

Mask Alinger (LEAM)

Spin Coater & Hot Plates

Wet Station

RF/DC Sputter

Thermal Evaporator

Electric Furnace

Plasma Cleaner

Critical Point Dryer

Ion Sputter Coater

Wire Bonder

SLA 3D Printer

Probe Station

Gas Sensor Measurement System 1

Gas Sensor Measurement System 2

3D Laser Microscope

Spectral System

Vibration Exciter

Contact Angle Analyzer

IR Camera

Fiber Arc Fusion Splicer