Plate Capacitor Flexing in Base Impact Test
The goal of this project was to develop a biocompatible accelerometer that can be used to safely and accurately measure brain tissue strain and kinematics. This was done through the design and simulation of a triaxial MEMS accelerometer. This sensor would be surgically implanted into the brain of the living person acting as the test subject. The target implantation area would be a sulcus, and the cerebral cortex. The sensor would be held in place with BioGlue. Accelerometer micromachining steps for both the comb capacitor and the flat plate capacitor are provided. Simulation results show the design functions properly and would be able to measure changes in acceleration. Potential applications of this type of sensor are also discussed.
MEMS Comb Accelerometer Horizontal Drop Test, performed in Solidworks.
MEMS Comb Accelerometer Vertical Drop Test, performed in Solidworks.