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Thermal ALD
Thermal ALD
PLATINA 100, NINESOL (ALPES)
DC/RF Sputter
DC/RF Sputter
6" sputter, Korea Vacuum Tech
Vaccum Probe Station (~77 K)
Vaccum Probe Station (~77 K)
VPX-77KD, Prime tech
Rapid Thermal Processing
Rapid Thermal Processing
Real RTP 100, ULTECH
Semiconductor Parameter Analyzer (with PMU)
Semiconductor Parameter Analyzer (with PMU)
Keithley 4200-SCS, Tektronix
LCR meter
LCR meter
Keysight E4980A, Keysight
Mask Aligner
Mask Aligner
MDA-400M, MIDAS SYSTEM
Spin Coater
Spin Coater
WS-650-23NPP, Laurell
Optical Microscope
Optical Microscope
BX53M, Evident (Olympus)
UV O3 Cleaner
UV O3 Cleaner
UV O3 Cleaner, Ossila
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