Rapid Thermal Process
▶Substrate Size
~ 8inch
▶Substrate SizeHeating Source
Halogen Lamp
▶Substrate SizeDeposition Direction
Up or Downward
▶Substrate SizeProcess Temp
~ 1000℃
▶Substrate SizeHeating Uniformity
≤±3%
Toggle Switch Control
Embedded Files
4inch sputtering system
▶Substrate SizeGun Size
4inch (Magnetron Sputter Gun)
▶Substrate SizeSubstrate Size
~ 200mm (option)
▶Substrate SizeProcess Gas
Ar,O2,
▶Substrate SizeDeposition Direction
Up or Downward
▶Substrate SizeProcess Temp
~ 700℃
▶Substrate SizeThickness Uniformity
≤±3%
▶Substrate SizeHeating Uniformity
≤±3%
Load Lock System
Full Automation Control
• 최적화된 Sputtering Cathode 설계로 인한 Co-Sputtering Process 가능.
• Cathode 시뮬레이션을 통한 높은 Target 사용효율 확보.
• 시뮬레이션에 기반을 둔 장비 설계로 적합한 Components 구성.
2inch sputtering system
▶Substrate SizeGun Size
4inch (Magnetron Sputter Gun)
▶Substrate SizeSubstrate Size
~ 200mm (option)
▶Substrate SizeProcess Gas
Ar,O2,
▶Substrate SizeDeposition Direction
Up or Downward
▶Substrate SizeProcess Temp
~ 700℃
▶Substrate SizeThickness Uniformity
≤±3%
▶Substrate SizeHeating Uniformity
≤±3%
Load Lock System
Full Automation Control
• 최적화된 Sputtering Cathode 설계로 인한 Co-Sputtering Process 가능.
• Cathode 시뮬레이션을 통한 높은 Target 사용효율 확보.
• 시뮬레이션에 기반을 둔 장비 설계로 적합한 Components 구성.
In-line sputtering System
▶In-Line Sputter 는 오늘날 박막 태양전지, 터치스크린 패널, Display 공정에 중요하게 쓰이는 도구 입니다.
▶투명한 전극 물질 및 금속 재료, 실리콘, 카드뮴, CIG계 재료 등 광범위한 물질을 증착하며, 불 투과성 레이어 및 버퍼, 흡수 레이어를 증착하는데 이상적인 장비 입니다.
• 최적화된 이송장치 설계를 통한 배면전극 억제
• 멀티레이어 가능
• 70% 이상의 타겟 사용 효율
• 고속증착 및 높은 균일도
Atomic layer deposition system
▶ Applications
Thin film process for ALD research: Al2O3, HfO2, ZrO2, TiO2, ZnO ……
- 100~200mm wafers
- Applications of R&D
- Very low price
▶ Features
ALD ultra-thin high-k dielectric with good thicknessuniformity and 100% conformal step coverage
Advanced process kit and small-volume chamber for short cycle times
Extremely materialize ALD mechanism (traveling wave method)
Small foot print
Totally integrated process module
Easy process control
Minimize gas supply line length
Solar Simulator
▶A solar simulator (also artificial sun) is a device that provides illumination approximating natural sunlight.
▶The purpose of the solar simulator is to provide a controllable indoor test facility under laboratory conditions,
used for the testing of solar cells, sun screen, plastics and other materials and device
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