FACILITY

Desk Sputter Coater  (Safematic CCU-010 HV)

Infrared Thermal Desorption Spectroscopy (ESCO)

AC Hall Measurement (Semi Lab. PDL-1000)

Glove Box  (VTI)  - Evaporation Insitu System 

High-resolution UV-Vis (UH4150)

High-resolution UV-Vis (UH4150) 

Ultra-High Vacuum (UHV) 1-inch Co-Sputtering System (<1E-7 Torr)

Ultra-High Vacuum (UHV) Evaporation Cluster System (<1E-7 Torr)

Ultra-High Vacuum (UHV) Evaporation Cluster System (<1E-7 Torr)

Ultra-High Vacuum (UHV) 2-inch Co-Sputtering System (<1E-7 Torr)

Rapid Thermal Annealing (RTA) System

Maskless Lithography System

Ultra-High Vacuum (UHV) Probe Station (<1E-8 Torr)

Ultra-High Vacuum (UHV) Probe Station (<1E-8 Torr)

Probe Station 

Probe Station

Semiconductor Parameter Analyzer (B1500A),  Impedance Analyzer (E4990A)

Move from Tokyo Tech to UNIST

Move from Tokyo Tech to UNIST


Move from Tokyo Tech to UNIST


Move from Tokyo Tech to UNIST


Move from Tokyo Tech to UNIST