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A. Deposition Experiment Equipments
[Unit 1] Ultra-High Vacuum (UHV)
2-inch Co-Sputtering System (<1E-7 Torr)
[Unit 2] Ultra-High Vacuum (UHV)
2-inch Co-Sputtering System (<1E-7 Torr)
[Unit 2] Ultra-High Vacuum (UHV)
2-inch Co-Sputtering System (<1E-7 Torr)
[Unit 3] Ultra-High Vacuum (UHV)
1-inch&2-inch Co-Sputtering System
(<1E-7 Torr)
[Unit 3] Ultra-High Vacuum (UHV)
1-inch&2-inch Co-Sputtering System
(<1E-7 Torr)
[Unit 3] Ultra-High Vacuum (UHV)
1-inch&2-inch Co-Sputtering System
(<1E-7 Torr)
Glove Box (VTI) - Evaporation Insitu System
Ultra-High Vacuum (UHV) Evaporation Cluster System (<1E-7 Torr)
Ultra-High Vacuum (UHV) Evaporation Cluster System (<1E-7 Torr)
Table Sputter Coater
(Safematic CCU-010 HV)
B. Process Equipments
Pumping Station
(<1E-7 kPa)
Pumping Station
(<1E-7 kPa)
Rapid Thermal Annealing (RTA) System
C. Measurement Equipments
Ellipsometer (Semi Lab. SE-2000)
Ellipsometer (Semi Lab. SE-2000)
Probe Station
Probe Station
Ultra-High Vacuum (UHV)
Probe Station (<1E-8 Torr)
Ultra-High Vacuum (UHV)
Probe Station (<1E-8 Torr)
Semiconductor Parameter Analyzer (B1500A),
Impedance Analyzer (E4990A)
High-resolution UV-Vis (UH4150)
High-resolution UV-Vis (UH4150)
Infrared Thermal Desorption Spectroscopy (TDS, ESCO)
AC Hall Measurement (Semi Lab. PDL-1000)
C. History of Equipments
Move from Tokyo Tech to UNIST
Move from Tokyo Tech to UNIST
Move from Tokyo Tech to UNIST
Move from Tokyo Tech to UNIST
Move from Tokyo Tech to UNIST
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