FACILITY

A. Deposition Experiment Equipments

[Unit 1] Ultra-High Vacuum (UHV)

2-inch Co-Sputtering System (<1E-7 Torr)

[Unit 2] Ultra-High Vacuum (UHV)

2-inch Co-Sputtering System (<1E-7 Torr)

[Unit 2] Ultra-High Vacuum (UHV)

2-inch Co-Sputtering System (<1E-7 Torr)

Ultra-High Vacuum (UHV)

1-inch Co-Sputtering System

(<1E-7 Torr)

Table Sputter Coater

(Safematic CCU-010 HV)

Maskless Lithography System

Rapid Thermal Annealing (RTA) System

Glove Box (VTI) - Evaporation Insitu System

Ultra-High Vacuum (UHV) Evaporation Cluster System (<1E-7 Torr)

Ultra-High Vacuum (UHV) Evaporation Cluster System (<1E-7 Torr)

B. Measurement Equipments

Ellipsometer (Semi Lab. SE-2000)

Ellipsometer (Semi Lab. SE-2000)

Probe Station

Probe Station

Ultra-High Vacuum (UHV)

Probe Station (<1E-8 Torr)

Ultra-High Vacuum (UHV)

Probe Station (<1E-8 Torr)

Semiconductor Parameter Analyzer (B1500A),

Impedance Analyzer (E4990A)

High-resolution UV-Vis (UH4150)

High-resolution UV-Vis (UH4150)

Infrared Thermal Desorption Spectroscopy (TDS, ESCO)

AC Hall Measurement (Semi Lab. PDL-1000)

C. History of Equipments

Move from Tokyo Tech to UNIST

Move from Tokyo Tech to UNIST

Move from Tokyo Tech to UNIST

Move from Tokyo Tech to UNIST

Move from Tokyo Tech to UNIST

Page updated

Google Sites

Report abuse