CSUN SEM Lab

I am the faculty Director of the CSUN Department of Geological Sciences' Scanning Electron Microscope (SEM) Lab. I began setting up the SEM lab as a user facility in 2012, and am advising CSUN undergraduate and MS student research involving EBSD analysis. We have a tungsten gun SEM that was installed in 2002 (the FEI Quanta 600), and we recently acquired a new field emission gun SEM (TESCAN MIRA4) through a NSF MRI grant - the largest MRI awarded in CSUN history. The FE-SEM was installed in 2022 and is now fully operational.

I welcome the opportunity to work collaboratively in the SEM lab with external users from academia or industry who are interested in imaging, EDS, or EBSD analysis of geologic materials. The Geology department's full-time laboratory technician (Dr. Zhan Peng) has some availability to assist users with the Quanta 600 for imaging (SE, BSE, CL) and EDS analysis. The user rates for the Quanta 600 W-filament E-SEM and the TESCAN MIRA4 FE-SEM are posted here. Please contact me by email (click HOME link at top left for email address) to inquire about the availability of technician help, analysis time, and to reserve a booking on the SEM calendar. We would appreciate the opportunity to be co-authors on any publications that result from data collected and/or processed in our lab. 


The Quanta 600 W-SEM in the CSUN SEM Lab.

The TESCAN MIRA4 FE-SEM in the CSUN SEM Lab.

The lab is equipped with a FEI Quanta 600 W-filament SEM with SE, BSE, CL, EDS, and EBSD detectors.

-Variable pressure modes: high vacuum, low vacuum, and environmental modes

-Oxford Instruments integrated EBSD + EDS system with Large Area Mapping function (AZtec Version 3.1)

-Oxford Instruments Nordlys Nano ultrahigh sensitivity EBSD camera

-Oxford Instruments 10 mm2 SiLi EDS detector with X-Stream2 pulse processor

-Gatan MiniCL system (greyscale images only)

The lab is equipped with a TESCAN MIRA4 LMU FE-SEM with SE, BSE, CL, EDS, and EBSD detectors.

-Variable pressure modes: high vacuum and low vacuum

-Oxford Instruments integrated EBSD + EDS system with Large Area Mapping function (AZtec Version 6.0)

-Oxford Instruments Symmetry S2 EBSD system

-Oxford Instruments 100 mm2 UltimMax large area SDD detector and EDS system

-TESCAN Panchromatic CL system (185-850 nm spectral range; greyscale images only)

SEM Lab general support equipment

-Carbon coater

-Cressington gold sputter coater

EBSD support equipment

-Dedicated offline PCs for post-processing of EBSD data

-Ultrapolishing lab facilities for EBSD sample preparation

The CSUN SEM Lab Safety Instructions and Lab Etiquette Guide is posted below. All CSUN SEM Lab Users agree to abide by these rules as a condition of using the lab.

SEM Lab Safety Instructions October 2023.pdf