Cleanroom Environmental Conditions
Temperature and Humidity: 22 ± 2 °C, 50 ± 5%
Cleanliness Class: Class 1,000
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Jeju National University Semiconductor Cleanroom
Jeju National University Semiconductor Cleanroom
Cleanroom Layout
Cleanroom Layout
Smock Room
Smock Room
Cleanroom Interior View
Cleanroom Interior View
Vertical Furnace for Oxidation
Vertical Furnace for Oxidation
Vertical Furnace for Diffusion
Vertical Furnace for Diffusion
Rapid Thermal Process (RTP)
Rapid Thermal Process (RTP)
DC Sputter
DC Sputter
RIE Etcher
RIE Etcher
Acid Fume Hood
Acid Fume Hood
Solvent Fume Hood
Solvent Fume Hood
Mask Aligner
Mask Aligner
Spin Coater
Spin Coater
Hot Plate
Hot Plate
Photoresist Refrigerator
Photoresist Refrigerator
Optical Microscope
Optical Microscope
Probe Station for Sensors
Probe Station for Sensors
Surface Profilometer
Surface Profilometer
Spectrophotometer
Spectrophotometer
Spectrofluorometer
Spectrofluorometer
제주대학교 공과대학 부설공장 113호 (반도체 클린룸)
클린룸 주 담당자: 엄두승 (dsum@jejunu.ac.kr)
클린룸 부 담당자: 임준용
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