Devendra Maurya, IIT Kanpur

Research Focus

My research integrates academic research with industry-driven innovation to develop flexible and printed sensor technologies into field-ready, high-TRL devices. My work spans flexible printed electronics, smart sensors, MEMS, and lab-on-chip systems, with translational impact across healthcare diagnostics, food quality and safety, and strategic applications.

Current Research Areas

Flexible printed thermal and temperature sensors
Room-temperature gas sensors and electronic nose (E-Nose) systems
Thin-film thermoelectric devices
Sensor systems for healthcare, food safety, and strategic applications

Past Innovations

RuO₂ Thin-Film pH Sensors (Biomedical Diagnostics)

Developed high-sensitivity potentiometric pH sensors, leading to a unique collaboration with Nobel Laureate Prof. Barry Marshall (University of Western Australia) for Helicobacter pylori detection, resulting in joint high-impact publications.

Lab-on-Chip Platforms

Cancer detection and circulating tumour cell isolation
Water quality analysis (A*STAR Singapore-sponsored)

MEMS Devices

Silicon MEMS piezoresistive accelerometers for aerospace sensing
India’s first silicon MEMS vaporizing liquid microthruster for micro/nano-satellites (ISRO-sponsored)

Lab on Chip Platform for Cancer Detection (CTC)

Silicon MEMS Piezoresistive Accelerometer

Nanoengineered Thin Film pH Sensor

Silicon MEMS Vaporizing Liquid Microthruster

C4D Microchip Electrophoresis

Global Research Experience

Australia (Monash University, Edith Cowan University)

Micro/nanofabrication, microfluidics, biosensors, and lab-on-chip systems
Contributions to Bionic Eye development (iridium oxide microelectrodes)
ZnO SAW-based microfluidic devices
Leadership of multi-million-dollar cleanroom and nanofabrication facilities

Singapore (Standard BioTools / Fluidigm, A*STAR–IMRE)

Industrial-scale lab-on-chip manufacturing and yield optimization
Soft lithography, multilayer PDMS microfluidics, chip-carrier bonding
Plastic microfluidic electrophoresis chips and EWOD characterization

India (IIT Kharagpur, IIT Kanpur)

MEMS and microelectronics R&D
Printed sensor systems and national-scale translational programs

Research Lab Leadership

IIT Kanpur:
Established a printed sensors fabrication and characterization facility (~INR 5 Crore) supporting flexible electronics R&D, gas sensing, thermal characterization, and sensor system validation.
Edith Cowan University, Australia:
Led operations of a $6M, 256 m² cleanroom, covering lithography, thin films, etching, characterization, and pilot-scale device fabrication.
Monash University & Melbourne Centre for Nanofabrication:
Managed multi-million-dollar nanofabrication laboratories and worked in one of the world’s most advanced shared cleanroom facilities.

Research Capabilities & Infrastructure

Flexible Printed Sensors & Electronics

Screen printing, inkjet printing, flexographic printing; dip coating; spin coating.
Ink formulation using high-energy ball milling, probe sonication, bath sonication, and magnetic stirring.

Micro / Nanofabrication Technologies

Thermal oxidation (wet and dry); diffusion (p-type, n-type).
Thin-film deposition: e-beam evaporation, magnetron sputtering, thermal evaporation, PECVD.
Patterning: photolithography, soft lithography (multilayer SU-8), hot embossing, nanoimprint lithography (NIL).
Etching: DRIE (Bosch process), RIE, wet silicon etching (KOH, dual-doped TMAH).
Annealing: rapid thermal annealing (RTA).

Characterization Techniques

Dynamic light scattering (DLS), viscometry, adhesion testing (ASTM).
SEM, EDS, AFM, XRD; profilometry, ellipsometry.
Semiconductor parameter analyzer, four-point probe.
Fluorescent microscopy, contact angle measurement (goniometer).

Sensor Testing & Measurement Infrastructure

Calibration gas generators (ppm–ppb range), headspace-GCMS system.
Software-controlled high-resolution hot & cold plate.
Temperature baths, humidity chambers.
Electronic test equipment including source meters and digital multimeters.

Software Tools

CoventorWare (MEMS design).
SUPREM (semiconductor process simulation).
LASI (photomask design).